Reverse Currents of p+/n diodes after High Energy Implantation of C+ and Ge+ ions and Annealing

Reverse Currents of p+/n diodes after High Energy Implantation of C+ and Ge+ ions and Annealing

Kögler, R.; von Borany, J.; Panknin, D.; Skorupa, W.; Baither, D.

• Nuclear Instruments and Methods in Physics Research B 96 (1995) 814
• Lecture (Conference)
  IIT 94

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Publ.-Id: 206