A novel setup for spectroscopic ellipsometry using an acousto-optic tuneable filter
A novel setup for spectroscopic ellipsometry using an acousto-optic tuneable filter
Fukarek, W.; von Keudell, A.
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Review of Scientific Instruments 66 (1995) 6, pp. 3545-3550 (zum Patent angemeldet am 20.12.93)
DOI: 10.1063/1.1145466
Cited 11 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-211
Publ.-Id: 211
