Ion Beam Induced Interfacial Amorphization of Silicon below Room Temperature

Ion Beam Induced Interfacial Amorphization of Silicon below Room Temperature

Heera, V.; Kögler, R.; Skorupa, W.; Henkel, T.

• Poster
  IBMM '95

Permalink: https://www.hzdr.de/publications/Publ-286
Publ.-Id: 286