Detection of metastable defective regions in ion-implanted Si by means of metal gettering

Detection of metastable defective regions in ion-implanted Si by means of metal gettering

Kögler, R.; Posselt, M.; Yankov, R. A.; Kaschny, J. R.; Werner, P.; Danilin, A. B.; Skorupa, W.

• Contribution to external collection
  MRS Symp. Proc. 469 (1997) 224

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Publ.-Id: 3099