Monte Carlo ion-implantation simulation for deep ULSI transistors

Monte Carlo ion-implantation simulation for deep ULSI transistors

Feudel, T.; Strecker, N.; Krause, U.; Schmidt, B.; Posselt, M.

• Lecture (Conference)
  Proc. 1999 Semiconductor TCAD Workshop, vol. 2, p. 7. 1, Hsinchu, Taiwan, May 1999
• Lecture (Conference)
  1999 Semiconductor TCAD Workshop, Hsinchu, Taiwan, May 4-6,1999
• Contribution to proceedings
  Proc. 1999 Semiconductor TCAD Workshop, vol. 2, p. 7. 1, Hsinchu, Taiwan, May 1999

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Publ.-Id: 3126