Elasic recoil detection analysis of ion-exchanged soda-lime glass substrates for a-SI:H devices

Elastic recoil detection analysis has been used to study the interaction between the soda-lime glass substrates and the a-Si:H films. It has been established that H and Na ions penetrate from the near-surface region of the substrate into the deposited film. The results have shown that the influence of the substrate on the properties of a-Si:H can be strongly reduced by glass surface modification using the processes of ion exchange and ion extraction.