Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationDistribution of gettering centres at a buried amorphous layer in Si
Kögler, R.; Eichhorn, F.; Mücklich, A.; Skorupa, W.; Danilin, A.
-
Lecture (Conference)
11th Int. Conf. on Ion Beam Modification of Materials, Amsterdam,The Netherlands, Aug. 31 - Sept. 4, 1998
Permalink: https://www.hzdr.de/publications/Publ-2239
Publ.-Id: 2239