Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Simultaneous in situ ellipsometry and elastic recoil detection analysis during plasma processing

Fukarek, W.

  • Lecture (Conference)
    ICSE-2, Charleston 1997

Permalink: https://www.hzdr.de/publications/Publ-2387
Publ.-Id: 2387