Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

TEM-Investigation of Si(001) Modified by Pr Implantation

Mücklich, A.; Kögler, R.; Eichhorn, F.

Keywords: high-K dielectrics; Pr oxide; Pr silicide; Pr silicate

• Poster
  Microscopy Conference, 28.08.-02.09.2005, Davos, Schweiz
• Contribution to proceedings
  Microscopy Conference 2005, 28.08.-02.09.2005, Davos, Switzerland

Permalink: https://www.hzdr.de/publications/Publ-7592