Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationInvestigation of the damage induced by 200 keV Ge+ ion implantation in 6H-SiC
Pacaud, Y.; Skorupa, W.; Perez-Rodriguez, A.; Brauer, G.; Stoemenos, J.; Barklie, R.
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Nuclear Instruments and Methods in Physics Research B 112 (1996) pp. 321-324
DOI: 10.1016/0168-583X(95)01006-8
Cited 4 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-890
Publ.-Id: 890