Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationPreparation of SiO2 Films with embedded Si Nanocrystals by Reactive RF-Magnetron Sputtering
Seifarth, H.; Grötzschel, R.; Markwitz, A.; Matz, W.; Nitzsche, P.; Rebohle, L.
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Thin Solid Films 330 (1998) 202-205
DOI: 10.1016/S0040-6090(98)00609-9
Cited 68 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-960