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The prototype of the new flash lamp apparatus: experiences, results, comparison old and new equipment

Anwand, W.

The prototype of the new flash lamp apparatus is discussed and compared with the old equipment. First experiences and results are reported.

Keywords: flash lamp annealing; semiconductor processing

  • Lecture (others)
    EU-Projekttreffen FLASiC, 15.10.2004, Ilmenau, Deutschland

Permalink: https://www.hzdr.de/publications/Publ-9894
Publ.-Id: 9894