developed by W. Möller

The program TRIDYN_HZDR simulates the dynamic change of thickness and/or composition of multicomponent targets during high-dose ion implantation or ion-beam-assisted deposition. The target and the grown layers are assumed to be amorphous. Up to 10 different atomic species, including those of the beam(s), may be considered. Up to 10 simultaneous irradiation conditions with different incident species, energies and angles may be defined.

TRIDYN_HZDR allows to calculate: compositional and damage depth profiles; surface erosion (when sputtering prevails) or grown layer thickness (in the opposite case); detailed statistics of ion slowing down and recoil transport; ion mixing efficiency. The program can also be run in static mode. 

The program is available for Linux and MSWindows systems.

How to get the TRIDYN code?

A software license agreement is required: Please fill in the End-Use Certificate (pdf) and the Software License Agreement (pdf), print them out twice and send them by mail to the following address:

Helmholtz-Zentrum Dresden-Rossendorf e. V.
Legal Affairs and Patents
Bautzner Landstr. 400
01328 Dresden

If you have any technical questions relating the software, please contact Prof. Wolfhard Möller. If you have any questions regarding the License Agreement, please contact

How to use TRIDYN code?

The file TRIDYN_UserGuide.pdf contains a detailed description of the code and detailed operation instructions.


Prof. Dr. Wolfhard Möller
Phone: +49 351 260 2245