TRI3DYN computer simulation describes ion irradiation effects in three-dimensional amorphous multicomponent material systems, and keeps track of the local dynamic modification and the development of the surface contour of the system due to ion implantation, atomic relocation and sputtering.

Up to 100 different atomic species and up to 20 irradiation/deposition conditions with different incident species, energies and angles may be simultaneously treated.

The code allows to predict 3D compositional and damage profiles, surface erosion (when sputtering prevails) and surface extension (when deposition prevails), and provides detailed statistics on ion slowing down, recoil transport and ion mixing, sputtering and vacuum/solid transitions. It may also be run in static mode.

The executable version is available for Linux and MS Windows environments.

Foto: TRI3DYN software example picture ©Copyright: H. Holland-Moritz

Source: W. Möller


Sputter shaping of a nanosphere: Au nanosphere of 50 nm diameter on Si initially (a) and after irradiation with 30 keV Ga+ ions at normal incidence and fluences of 2·1015 cm-2 (b), 4·1015 cm-2 (c), 6·1015 cm-2 (d), 8·1015 cm-2 (e) and 1·1016 cm-2 (f). The TRI3DYN simulation (with periodic lateral boundary conditions) demonstrates the size reduction and shaping by sputtering, the substrate surface erosion, and the contamination of the original sphere with sputtered substrate material and vice versa. The incorporation of Ga is small and not shown here. (See H. Holland-Moritz et al., Semicond. Sci. Tech. 30(2015)33001)

For additional examples of application, see here.

If you have any technical questions related to the software, please contact Prof. Wolfhard Möller.

How to get the TRI3DYN code?

for non-commercial application:

For a free license, a software license agreement is required:

Please fill in the End-Use Certificate (manual downloadable here) and send it to for review in advance.

After a successful export control check, we will send you the contract template of the License Agreement.

We kindly ask you to then print out the approved EUC and the License Agreement twice each. Please sign all documents and send the original License Agreement (2x)  and the original EUC (2x) by mail to

Helmholtz-Zentrum Dresden - Rossendorf e. V.

Board Office | Legal Affairs

Bautzner Landstraße 400

01328 Dresden


If you have any technical questions relating to the software, please contact Prof. Dr. W. Möller (

If you have any questions regarding the License Agreement, please contact

for commercial application:

For commercial application, the software is licensed by HZDR Innovation GmbH


Prof. Dr. Wolfhard Möller
Phone: +49 351 260 2245