Division Ion Beam Center

The division Ion Beam Center focuses on the modification and analysis of solid surfaces by the use of ions in a wide energy range (eV to MeV). The department ensures the operation and the methodical development of a variety of ion beam and plasma techniques. The use of facilities for materials research occures in close collaboration with other institute departmentals. In addition to ion beam analysis, for a comprehensive characterization of materials electron microscopy (TEM, SEM, cross-beam systems), and X-ray-based analysis techniques are used for structural elucidation. R&D work using ion-induced effects or structures for opto-and nanoelectronic devices can be performed in a class 100 clean room.

The Ion Beam Center (IBC)(1) acts as a Helmholtz user facility for ion beam techniques available to national and international partners. Ion beam services is provides in a close collaboration with the HZDR Innovation GmbH(2).

Project groups

Foto: 500kV Implanter_cropped ©Copyright: HZDR(3)

Ion Technology

Foto: TEM FWIS_partition ©Copyright: hzdr(5)

Ion Beam / Structure Analysis

Group leader
Dr. S. Facsko(6)
Foto: HZDR logo in the eye of a fly ©Copyright: Dr. Roman Böttger(7)

Ion Induced Nanostructures

Group leader
Dr. S. Facsko(8)
Foto: Nanoparkwafer_cropped ©Copyright: HZDR(9)

Process Technology and Devices

Group leader
Dr. A. Erbe(10)
Foto: Atomistic Simulation IBC ©Copyright: Dr. Arkady Krasheninnikov(11)

Atomistic Simulations of irradiation-induced Phenomena

URL of this article


Dr. Johannes von Borany
Head of Ion Beam Center
Phone: +49 351 260 3378
Fax: 13378


Ion Beam Center: https://www.hzdr.de/db/Cms?pNid=1984

Links of the content

(1) http://www.hzdr.de/db/Cms?pNid=1984
(2) http://www.hzdr-innovation.de/
(3) http://www.hzdr.de/db/Cms?pOid=10632
(4) http://www.hzdr.de/db/ContMan.Visi.Card?pNid=no&pUser=116
(5) http://www.hzdr.de/db/Cms?pOid=35632
(6) http://www.hzdr.de/db/ContMan.Visi.Card?pNid=no&pUser=1837
(7) http://www.hzdr.de/db/Cms?pOid=24332
(8) http://www.hzdr.de/db/ContMan.Visi.Card?pNid=no&pUser=1837
(9) http://www.hzdr.de/db/Cms?pOid=10638
(10) http://www.hzdr.de/db/ContMan.Visi.Card?pNid=no&pUser=4858
(11) http://www.hzdr.de/db/Cms?pOid=46208
(12) http://www.hzdr.de/db/ContMan.Visi.Card?pNid=no&pUser=112508