Department Ion Beam Center

The department Ion Beam Center focuses on the modification and analysis of solid surfaces by the use of ions in a wide energy range (eV to MeV). The department ensures the operation and the methodical development of a variety of ion beam and plasma techniques. The use of facilities for materials research occures in close collaboration with other institute departmentals. In addition to ion beam analysis, for a comprehensive characterization of materials electron microscopy (TEM, SEM, cross-beam systems), and X-ray-based analysis techniques are used for structural elucidation. R&D work using ion-induced effects or structures for opto-and nanoelectronic devices can be performed in a class 100 clean room.

The Ion Beam Center (IBC)(1) acts as a Helmholtz user facility for ion beam techniques available to national and international partners. Ion beam services is provides in a close collaboration with the HZDR Innovation GmbH(2).

Project groups

Foto: 500kV Implanter_cropped ©Copyright: HZDR

Ion Technology

Group leader
Dr. J. von Borany(3)
Foto: TEM FWIS_partition ©Copyright: hzdr

Ion Beam / Structure Analysis

Group leader
Dr. S. Facsko(4)
Foto: HZDR logo in the eye of a fly ©Copyright: Dr. Roman Böttger

Ion Induced Nanostructures

Group leader
Dr. S. Facsko(5)
Foto: Nanoparkwafer_cropped ©Copyright: HZDR

Process Technology and Devices

Group leader
Dr. A. Erbe(6)
Foto: Atomistic Simulation IBC ©Copyright: Dr. Arkady Krasheninnikov

Atomistic Simulations of irradiation-induced Phenomena

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Dr. Johannes von Borany
Head of Ion Beam Center
Phone: +49 351 260 3378
Fax: +49 351 260 13378


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