AIM - Center for Application of Ion Beams in Materials Research

Fliegenauge blau



List of installations

All existing experimental facilities will be open for external users. However, it is expected that the interest will focus on

• 3 electrostatic MeV accelerators ( 5 MV tandem, 3 MV Tandetron, 2 MV van de Graaff)
• 7 beam lines for ion beam analysis (2x RBS, ERDA, external proton beam - PIXE, NRA, nuclear microprobe, high-resolution RBS with magnet spectrometer)
• three ion implanters (200 kV high current implanter, 500 kV implanter, LE broad beam implanter)
• 2 devices for plasma-based ion implantation (200-liter chamber, metal PBII)
• 2 devices for ion beam assisted deposition (IBAD)
• Fine-focused ion beam machine

LE-Implanter 2


DIChamber 2


AIM  Specialities: 

Simultaneaous Double Implantation

  • Target Station Combining 3MV Tandetron and 500 kV Implanter

Ion Beam Analysis

  • ERDA at Nuclear Microprobe

Mikrosonde 1




Real-Time In-situ Analysis

  • Low-energy ion beam processing (< 2 keV) combined with in-situ heavy-ion ERDA
  • Real-time in-situ surface analysis and plasmadiagnostic during magnetron sputtering using ion beam analysis (NRA) and mass spectroscopy
  • Gaseous ion implantation (< 20 kV) combined with in-situ RBS and heavy-ion ERDA
  • High-energy implantation (from 3 MV Tandetron or 500 kV implanter) combined with in-situ high-resolution RBS
  • Ion beam assisted deposition combined with in-situ optical diagnostics (ellipsometry, infrared absorption) and in-situ film stress measurement






Schema of the Ion Beam Center AIM

Ionenstrahlzentrum 2006

Managing Director: Prof. Dr. Wolfhard Möller
Management: Prof. Dr. Andreas Kolitsch
Forschungszentrum Dresden-Rossendorf e.V.
Institute of Ion Beam Physics and Materials Research
P.O.Box 51 01 19, D-01314 Dresden, Germany
Tel.: +49 (0)351-260 3348, Fax: +49 (0)351-260 2703