developed by W. Möller
The program TRIDYN_HZDR simulates the dynamic change of thickness and/or composition of multicomponent targets during high-dose ion implantation or ion-beam-assisted deposition. The target and the grown layers are assumed to be amorphous. Up to 5 different atomic species, including those of the beam, may be considered. It is possible to use in the beam up to 4 different ion species with different energies and angles of incidence. The initial target may consist of up to 4 different species (up to 5 if some amount of a beam species is already present in the target). Homogeneous as well as inhomogeneous targets can be considered. Two different types of inputs may be used for inhomogeneous targets: dialog-input of layers, and input of the composition profile from a file.
TRIDYN_HZDR allows to calculate: depth profiles of all atomic species in the target; surface erosion (when sputtering prevails) or grown layer thickness (in the opposed case), etc.
The program is available for Linux and MSWindows systems.
How to get the TRIDYN code?
Technology Transfer and Legal Rights
P.O. Box 510119
How to use TRIDYN code?
The file TRIDYN_UserGuide.pdf contains a detailed description of the code and detailed operation instructions.