Contact

Porträt Dr. Bischoff, Lothar; FWIZ-N

Dr. Lothar Bischoff

Nanostructures by focused electrons and ions
Liquid Metal Alloy Ion Sources
Ion Induced Nanostructures
l.bischoffAthzdr.de
Phone: +49 351 260 2866
+49 351 260 2963

Porträt Dr. Klingner, Nico; FWIZ-N

Dr. Nico Klingner

R&D of Focussed Ion Beams (FIB) using Liquid Metall Alloy Ion Sources (LMAIS) or He/Ne GFIS
Ion Induced Nanostructures
n.klingnerAthzdr.de
Phone: +49 351 260 2524

Focused Ion Beams

Focused ion beams (FIB) are promising tools in micro- and nanotechnology as well as in material analytics. Characteristic properties are the Nanometer spot size, the energy range from some eV up to 200 keV, the high current density and a broad spectrum of ion species. In commercial FIB systems Ga liquid metal ion sources (LMIS) are usually employed, but in some rare cases also liquid metal alloy ion sources (LMAIS) are used. FIB systems allow to create structures of arbitrary shape with dimensions on the nm scale.

Flüssigmetall Ionenquelle Massenspektren einer GaBi Legierungs- Flüssigmetallionenquelle als Funktion des Ionenemissionsstromes
Fig. 1: Glowing LMAIS during the wetting process Fig. 2: Mass spectra of emitted ions from a Gallium-Bismuth ion source

Applications

Instrumentation

  • Carl Zeiss NVision 40 CrossBeam Ga-FIB for standard applications like ion beam lithography or TEM lamella preparation
  • 2x Orsay Physics CANION Z31Mplus mass-separated FIBs (semi-commercial), which can provide various ion species using in-house developed ion sources, for dedicated research Topics
  • Carl Zeiss ORION NanoFab Helium Ion Microscope He/Ne-FIB

FIB cut into CPU

Eye of a fruit fly

Fig. 3: FIB cut into a processor

Fig. 4: Eye of a fruit fly

Current projects

Demonstration of Raith-Focused-Ion-Beam-Systems for the Fabrication of magnetic Nano-structures (03/2020 – 02/2022)

Grant no.: ZF4494801 DF7 

The VELION (Raith), a modern two-beam system, consists of a column for mass-separated focused ion beams (FIB), a scanning electron microscope (SEM) and a laser interferometer-controlled stage. A major advance is the use of liquid metal alloy ion sources, which offer the possibility to use ion beams of different ion species, which is interesting for both basic research as well as industrial technology. One goal of this project, for example, is the fabrication and modification of magnetic nanostructures. This is of great importance for information technology (IT) in terms of a gradual reduction of the structure size and the operation speed while improving the energy efficiency by using spintronic technology. This project focuses on the modification of individual magnetic nanostructures and the formation of large-area magnonic arrays, so called magnonic crystals.

Development of LMAIS for nano- and quantumtechnology (11/2017 – 12/2019)

Grant no.: ZF4330902 DF7 

Raith develops lithography systems for the structuring and manufacturing of next-generation quantum and nanotechnology devices. The Helmholtz-Zentrum Dresden-Rossendorf develops novel ion sources for use in research and development. In the proposed project, both systems will be integrated into a novel, industrially usable ion beam lithography system for structuring the components of the next quantum and nano technology generation. The aim of the project is the development of an ion beam lithography system unique in its architecture, software and performance, which can address new applications in nano and quantum technology thanks to specific alloy ion sources. In terms of plant engineering, the development is based on Raith's existing know-how of the ionLINE PLUS system. On the material side, the alloys AuGeSi, AuSiCr, AuBGeNi and GaBiLi will be investigated by the HZDR with regard to their specifics with regard to their use in the new ion beam lithography system to be developed. The spectrum of the investigated materials results from the application scenarios to be covered by the new FIB system.

All publications

Theses, patents

Recent publications

2020

Conductive ITO interfaces for optoelectronic applications based on highly ordered inverse opal thin films

L. Galle, S. Ehrling, S. Lochmann, S. Kaskel, L. Bischoff, J. Grothe


Sputtering of nanostructured tungsten and comparison to modelling with TRI3DYN

R. Stadlmayr, P. S. Szabo, D. Mayer, C. Cupak, T. Dittmar, L. Bischoff, S. Möller, M. Rasinski, R. A. Wilhelm, W. Möller, F. Aumayr

Downloads:

  • Secondary publication expected from 07.02.2021

Boron Liquid Metal Alloy Ion Sources for Special FIB Applications

L. Bischoff, N. Klingner, P. Mazarov, W. Pilz, F. Meyer

Downloads:


Morphology modification of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm

X. Xu, K.-H. Heinig, W. Möller, H.-J. Engelmann, N. Klingner, A. Gharbi, R. Tiron, J. Borany, G. Hlawacek

Downloads:


2019

P1803 - Teilchenspektrometer und Teilchenspektrometrieverfahren

N. Klingner, R. A. Wilhelm

  • Patent
    DE102018106412 - Offenlegung 26.09.2019

Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns

M. Mousley, S. Eswara, O. de Castro, O. Bouton, N. Klingner, C. T. Koch, G. Hlawacek, T. Wirtz


Lithium Ion Beams from Liquid Metal Alloy Ion Sources

W. Pilz, P. Mazarov, N. Klingner, S. Bauerdick, L. Bischoff

Downloads:


Time-of-flight secondary ion mass spectrometry in the helium ion microscope

N. Klingner, R. Heller, G. Hlawacek, S. Facsko, J. von Borany

Downloads:


2018

P1709 - Vorrichtung und Verfahren zum Erzeugen von Ionenpulsen

R. A. Wilhelm, N. Klingner, S. Facsko

  • Patent
    DE102017218456 - Erteilung 22.11.2018

Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology

J. Gierak, P. Mazarov, L. Bruchhaus, R. Jede, L. Bischoff

Downloads:


Electronic-skin compasses for geomagnetic field driven artificial magnetoception and interactive electronics

G. S. Cañón Bermúdez, H. Fuchs, L. Bischoff, J. Fassbender, D. Makarov

Downloads:


Site-controlled formation of single Si nanocrystals in a buried SiO₂ matrix using ion beam mixing

X. Xu, T. Prüfer, D. Wolf, H.-J. Engelmann, L. Bischoff, R. Hübner, K.-H. Heinig, W. Möller, S. Facsko, J. von Borany, G. Hlawacek


Modelling of focused ion beam induced increases in sample temperature: a case study of heat damage in biological samples

A. Wolff, N. Klingner, W. Thompson, Y. Zhou, J. Lin, Y. Y. Peng, J. A. M. Ramshaw, Y. Xiao


Swift heavy ion shaping of oxide-structures at (sub)-micrometer scales

R. Ferhati, S. Amirthapandian, M. Fritzsche, L. Bischoff, W. Bolse

Downloads:

  • Secondary publication expected

Magnetosensitive e-skins with directional perception for augmented reality

G. S. Cañón Bermúdez, D. D. Karnaushenko, D. Karnaushenko, A. Lebanov, L. Bischoff, M. Kaltenbrunner, J. Fassbender, O. G. Schmidt, D. Makarov


Enhancements in full-field PIXE imaging - large area elemental mapping with increased lateral resolution devoid of optics artefacts

J. Buchriegler, N. Klingner, D. Hanf, F. Munnik, S. H. Nowak, O. Scharf, R. Ziegenrücker, A. D. Renno, J. von Borany


Contact

Dr. Lothar Bischoff

Nanostructures by focused electrons and ions
Liquid Metal Alloy Ion Sources
Ion Induced Nanostructures
l.bischoffAthzdr.de
Phone: +49 351 260 2866
+49 351 260 2963

Dr. Nico Klingner

R&D of Focussed Ion Beams (FIB) using Liquid Metall Alloy Ion Sources (LMAIS) or He/Ne GFIS
Ion Induced Nanostructures
n.klingnerAthzdr.de
Phone: +49 351 260 2524