Porträt Dr. Hlawacek, Gregor; FWIZ-N

Dr. Gregor Hlawacek

Head Ion Induced Nanostructures
Ion Microscopy
Phone: +49 351 260 3409
+49 351 260 2411

Ion Induced Nanostructures

We study processes during the interaction of low energy (10 eV – 50 keV) ions with different charge states with materials, especially for the controlled modification and nano-patterning of their surfaces. Such modifications can be material removal through sputtering of surface atoms but also near surface ion beam mixing, ion beam induced defect engineering, or implantation of guest atoms (see figure below). Bottom up as well as top down surface structuring can be achieved through the use of either broad beam irradiation or focused ion beam irradiation.

The first one allows to roughen, smoothen, or clean technical surfaces. Furthermore, the energy deposited by the continuous ion impact drives the surface out of equilibrium inducing many processes on the surface and the sub-surface region.


Ioneninduzierte Oberflächenprozesse

Alternatively, focused ion beams allow the top down structuring of surfaces or surface near regions with a high spatial resolution compatible with modern nanostructure fabrication requirements. In our group we employ a wide range of focused ion beams from very light nobel gas ions to small heavy ion clusters to understand the behaviour of materials and create state-of-the-art nanostructures.

Main research topics:

Foto: A silicon surface after 500 eV Ar+ sputtering under 67° ©Copyright: Dr. Stefan Facsko

Pattern formation and surface analytics

Information about surface modification by low-energy ion irradiation and surface analytics by spectroscopy and scanning probe techniques
Foto: liquid metal ion source ©Copyright: Dr. Lothar Bischoff

Focused Ion Beams

Information about the development and application of focused ion beams using liquid metal alloy ion sources
Foto: HIM Trimer ©Copyright: Gregor Hlawacek

Helium Ion Microscopy

Information about Helium Ion Microscopy with special emphasis on the Orion NanoFab installed at the HZDR.
Foto: Energy_barriers_XW_MP ©Copyright: Dr. Matthias Posselt

Compu­ter Simulations

Defects and diffusion
Foto: ArBlade - FWIZ-N Instrument ©Copyright: Dr. Nico Klingner

Setups - FWIZ-N

List of our setups for pre­paration, material modifications, analytical methods, and imaging.

Group information:

Group Members - Ion Induced Nanostructures

Current and former group members

Recent publications

Older publications can be found in the database (longer loading time)


Quantitative nanoscale imaging using transmission He ion channelling contrast: Proof-of-concept and application to study isolated crystalline defects

S. Tabean, M. Mousley, C. Pauly, O. de Castro, E. Serralta Hurtado De Menezes, N. Klingner, G. Hlawacek, T. Wirtz, S. Eswara


  • Secondary publication expected from 01.12.2022


Probing ultrafast laser plasma processes inside solids with resonant small angle X-ray scattering

L. Gaus, L. Bischoff, M. Bussmann, E. Cunningham, C. B. Curry, Juncheng E, E. Galtier, M. Gauthier, A. Laso García, M. Garten, S. Glenzer, J. Grenzer, C. Gutt, N. Hartley, L. Huang, U. Hübner, D. Kraus, H. J. Lee, E. E. McBride, J. Metzkes-Ng, B. Nagler, M. Nakatsutsumi, J. Nikl, M. Ota, A. Pelka, I. Prencipe, L. Randolph, M. Rödel, Y. Sakawa, H.-P. Schlenvoigt, M. Smid, F. Treffert, K. Voigt, K. Zeil, T. Cowan, U. Schramm, T. Kluge

Related publications

In-situ GISAXS observation of ion-induced nanoscale pattern formation on crystalline Ge(001) in the reverse epitaxy regime

D. Erb, P. Myint, K. Evans-Lutterodt, K. Ludwig, S. Facsko

Related publications

Controlled and deterministic creation of synthetic antiferromagnetic domains by focused ion beam irradiation

F. Samad, G. Hlawacek, S. S. P. K. Arekapudi, X. Xu, L. Koch, M. Lenz, O. Hellwig

Related publications

Enhanced trion emission in monolayer MoSe2 by constructing a type-I van der Waals heterostructure

J. Duan, P. Chava, M. Ghorbani Asl, A. Krasheninnikov, D. Erb, L. Hu, H. Schneider, L. Rebohle, A. Erbe, M. Helm, Y.-J. Zeng, S. Zhou, S. Prucnal

The npSCOPE: a new multimodal instrument for in-situ correlative analysis of nanoparticles

O. de Castro, A. Biesemeier, E. Serralta Hurtado De Menezes, O. Bouton, R. Barrahma, Q. Hung Hoang, S. Cambier, T. Taubitz, N. Klingner, G. Hlawacek

Revealing inflammatory indications induced by titanium alloy wear debris in periprosthetic tissue by label-free correlative high-resolution ion, electron and optical micro-spectroscopy

R. Podlipec, E. Punzón-Quijorna, L. Pirker, M. Kelemen, P. Vavpetič, R. Kavalar, G. Hlawacek, J. Štrancar, P. Pelicon, S. K. Fokter

Related publications

Atomistic Simulations of Defect Production in Monolayer and Bulk Hexagonal Boron Nitride under Low- and High-Fluence Ion Irradiation

S. Ghaderzadeh, S. Kretschmer, M. Ghorbani Asl, G. Hlawacek, A. Krasheninnikov

Fluorination of graphene leads to susceptibility for nanopore formation by highly charged ion impact

S. Creutzburg, M. Mergl, R. Hübner, I. Jirka, D. Erb, R. Heller, A. Niggas, P. L. Grande, F. Aumayr, R. A. Wilhelm, M. Kalbac, S. Facsko

Related publications


Domain wall damping in ultrathin nanostripes with Dzyaloshinskii-Moriya interaction

O. Volkov, F. Kronast, C. Abert, E. S. Oliveros Mata, T. Kosub, P. Makushko, D. Erb, O. Pylypovskyi, M.-A. Mawass, D. Sheka, S. Zhou, J. Faßbender, D. Makarov

Nano-hillock formation on CaF2 due to individual slow Au-cluster impacts

G. L. Szabo, M. Lehner, L. Bischoff, W. Pilz, U. Kentsch, F. Aumayr, N. Klingner, R. A. Wilhelm


Dr. Gregor Hlawacek

Head Ion Induced Nanostructures
Ion Microscopy
Phone: +49 351 260 3409
+49 351 260 2411