Publications - nanostrucures, nanoclusters

 

Conference contributions
Diploma theses
PhD theses
Patents

 

Publications

 

2011

 

  • P. Danesh, B. Pantchev, J. Wiezorek, B. Schmidt, D. Grambole Effect of hydrogen on hardness of amorphous silicon, Appl. Phys. A 102 (2011) 131

 

2010

 

  • H.-J. Fitting, L. Fitting Kourkoutis, R. Salh, E. V. Kolesnikova, M. V. Zamoryanskaya, A. von Czarnowski, B. Schmidt Silicon Cluster Aggregation in Silica Layers, Solid State Phenomena 156-158 (2010) 529
  • J. Potfajova, B. Schmidt, M. Helm, T. Gemming, M. Benyoucef, A. Rastelli, O. G. Schmidt Microcavity enhanced silicon light emitting pn-diode, Appl. Phys. Lett. 96 (2010) 151113
  • H.-J. Fitting, L. Fitting Kourkoutis, Roushdey Salh, M. V. Zamoryanskaya, and B. Schmidt Silicon nanocluster aggregation in SiO2:Si layers, Phys. Stat. Sol. A 207 (2010) 117
  • H.-J. Fitting, L. Fitting Kourkoutis, R. Salh, E. V. Kolesnikova, M. V. Zamoryanskaya, A. von Czarnowski, B. Schmidt Silicon Cluster Aggregation in Silica Layers, Solid State Phenomena 156-158 (2010) 529
  • P. Dimitrakis, V. Ioannou-Sougleridis, P. Normand, C. Bonafos, S. Schamm-Chardon, A. Mouti, B. Schmidt, J. Becker Formation of Ge Nanocrystals in High-k Dielectric Layers for Memory Applications, Mater. Res. Soc. Symp. Proc. vol. 1250 (2010), 1250-G06-04
  • P. Danesh, B. Pantchev, J. Wiezorek, B. Schmidt Effect of keV ion irradiation on mechanical properties of hydrogenated amorphous silicon, Nuclear Instruments and Methods in Physics Research B 268 (2010) 2660
  • J. Potfajova, B. Schmidt, M. Helm, T. Gemming, M. Benyoucef, A. Rastelli, O. G. Schmidt Microcavity enhanced silicon light emitting pn-diode, Appl. Phys. Lett. 96 (2010) 151113
  • H.-J. Fitting, L. Fitting Kourkoutis, Roushdey Salh, M. V. Zamoryanskaya, B. Schmidt Silicon nanocluster aggregation in SiO2:Si layers, Phys. Status Solidi A 207 (2010) 117
  • Pantchev, B.; Danesh, P.; Schmidt, B.; Grambole, D.; Bischoff, L. Ion-beam induced hydrogen redistribution in a-Si:H-based triple layer structures, Journal of Physics: Conference Series 253 (2010) 012055
  • Pantchev, B.; Danesh, P.; Wiezorek, J.; Schmidt, B. Nanoindentation-induced pile-up in hydrogenated amorphous silicon, Journal of Physics: Conference Series 253 (2010) 012054
  • Schmidt, B.; Zier, M.; Potfajova, J.; Philipp, P. Ion Implantation in AFM Cantilever Array Fabrication, PRONANO Proceedings of the Integrated Project on Massively Parallel Intelligent Cantilever Probe Platforms for Nanoscale Analysys and Synthesis, Münster: Monsenstein und Vannerdat OHG (MV Wissenschaft), 2010, pp. 111-117
  • Philipp, P.; Schmidt, B.; Zier, M. Charge carrier depth profiling of boron doped single crystalline silicon by Stepwise Oxidation Profiling (SWOP), AIP Conference Proceedings 1321 (2010), 216
  • Schlosser, M.; Iskra, P.; Abelein, U.; Lange, H.; Lochner, H.; Sulima, T.; Wiest, F.; Zilbauer, T.; Schmidt, B.; Eisele, I.; Hansch, W. The Impact Ionization MOSFET (IMOS) as Low-Voltage Optical Detector, Nuclear Instruments and Methods in Physics Research A 624 (2010), 524

 

2009

 

  • Batabyal, R.; Patra, S.; Roy, A.; Roy, S.; Bischoff, L.; Dev, B. N. Estimation of diffusion coefficient by photoemission electron microscopy in ion-implanted nanostructures, Applied Surface Science 256, 536 (2009)
  • Beyer, R.; Borany, J. von Evidence of a thermally stimulated charge transfer mechanism and interface defect formation in metal-oxide-semiconductor structures with germanium nanocrystals, Journal of Applied Physics 105, 064513 (2009)
  • Beyer, R.; Borany, J. von; Burghardt, H. Interface and border trap relaxation in Si/SiO2 structures with Ge nanocrystals examined by transient capacitance spectroscopy, Microelectronic Engineering 86, 1859 (2009)
  • Beyer, V.; Schmidt, B.; Heinig, K.-H.; Stegemann, K.-H. Light emitting field effect transistor with two self-aligned Si nanocrystal layers, Applied Physics Letters 95, 193501 (2009)
  • Beyer, V.; Borany, J. von; Klimenkov, M.; Müller, T. Current-voltage characteristics of metal-oxide-semiconductor devices containing Ge or Si nanocrystals in thin gate oxides, Journal of Applied Physics 106, 064505 (2009)
  • Bischoff, L.; Schmidt, B.; Lange, H.; Donzev, D. Nano-structures for sensors on SOI by writing FIB implantation and subsequent anisotropic wet chemical etching, Nuclear Instruments and Methods in Physics Research B 267, 1372 (2009)
  • Dimitrakis, P.; Mouti, A.; Bonafos, C.; Schamm, S.; Ben Assayag, G.; Ioannou, V.; Schmidt, B.; Becker, J.; Normand, P. Ultra-low energy ion beam synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications, Microelectronic Engineering 86, 1838 (2009)
  • Schmidt, B.; Heinig, K.-H.; Mücklich, A.; Akhmadaliev, C. Swift-heavy-ion-induced shaping of spherical Ge nanoparticles into disks and rods, Nuclear Instruments and Methods in Physics Research B 267, 1345 (2009)
  • Roushdey Salh, L. Kourkoutis, M.V. Zamoryanskaya, B. Schmidt, H.-J. Fitting Ion implantation, luminescence and cluster growth in silica layers, Journal of Non-Crystalline Solids 355 (2009) 1107

 

2008

 

  • Beyer, V.; Eichhorn, F.; Borany, J. von; Mücklich, A.; Müller, T. Ion beam synthesis and charge storage behavior of Au nanocrystals in thin SiO2 layers, Journal of Applied Physics 104, 024512 (2008)
  • Beyer, V.; Borany, J. von Elemental redistribution and Ge loss during ion-beam synthesis of Ge nanocrystals in SiO2 films, Physical Review B 77, 014107 (2008)
  • Ivanova, K.; Sarov, Y.; Ivanov, T.; Frank, A.; Zöllner, J.; Bitterlich, C.; Wenzel, U.; Volland, B. E.; Klett, S.; Rangelow, I. W.; Zawierucha, P.; Zielony, M.; Gotszalk, T.; Dontzov, D.; Schott, W.; Nikolov, N.; Zier, M.; Schmidt, B.; Engl, W.; Sulzbach, T.; Kostic, I. Scanning proximal probes for parallel imaging and lithography, Journal of Vacuum Science & Technology B 26, 2367 (2008)

 

2007

 

  • Salh, R.; Fitting, L.; Kolesnikova, E. V.; Sitnikova, A. A.; Zamoryanskaya, M. V., Schmidt, B.; Fitting, H.-J. Si and Ge nanocluster formation in silica matrix, Semiconductors 41, 397 (2007)
  • Schmidt, B. Nanocluster memories by ion beam synthesis of Si in SiO2, Materials Science 25, 1213 (2007)
  • Schmidt, B. Nanostructures by ion beams, Radiation Effects and Defects in Solids 162, 171 (2007)
  • Schmidt, B.; Mücklich, A.; Röntzsch, L.; Heinig, K.-H. How do high energy heavy ions shape Ge nanoparticles embedded in SiO2?, Nuclear Instruments and Methods in Physics Research B 257, 30 (2007)
  • Schöndorfer, C.; Lugstein, A.; Bischoff, L.; Hyun, Y. J.; Pongratz, P.; Bertagnolli, E. FIB induced growth of antimony nanowires, Microelectronic Engineering 84, 1440 (2007)
  • Schöndorfer, Ch.; Lugstein, A.; Hyun, Y.-J.; Bertagnolli, E.; Bischoff, L.; Nellen, P. M.; Callegari, V.; Pongratz, P. Focused ion beam induced synthesis of a porous antimony nanowire network, Journal of Applied Physics 102, 044308 (2007)
  • Takahashi, S.; Dawson, P.; Zayats, A. V.; Bischoff, L.; Angelov, O.; Dimova-Malinovska, D.; Tsvetkova, T.; Townsend, P. D. Optical contrast in ion-implanted amorphous silicon carbide nanostructures, Journal of Physics D 40, 7492 (2007)
  • Rangelow, I. W.; Ivanov, T.; Ivanova, K.; Volland, B. E.; Grabiec, P.; Sarov, Y.; Persaud, A.; Gotszalk, T.; Zawierucha, P.; Zielony, M.; Dontzov, D.; Schmidt, B.; Zier, M.; Nikolov, N.; Kostic, I.; Engl, W.; Sulzbach, T.; Mielczarski, J.; Kolb, S.; Latimier, Du P.; Pedreau, R.; Djakov, V.; Huq, S. E.; Edinger, K.; Fortagne, O.; Almansa, A.; Blom, H. O. Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications, Microelectronic Engineering 84, 1260 (2007)
  • Beyer, V., von Borany, J., Heinig, K.-H. Dissociation of Si+ ion implanted and as-grown thin SiO2 layers during annealing in ultra-pure neutral ambient by emanation of SiO, J. Appl. Phys. 101 (2007) 053516

  • Beyer, V., von Borany, J. A transient electrical model of charging for Ge nanocrystal containing gate oxides, J. Appl. Phys. 101 (2007) 094507

  • Röntzsch, L., Heinig, K.-H., Schuller, J. A.,Brongersma, M. L. Thin film patterning by surface-plasmon-induced thermocapillarity, Appl. Phys. Lett. 90 (2007) 044105

 

2006

 

  • Beyer, V., von Borany, J., Klimenkov, M. Determination and evolution of tunneling distances in Ge nanocrystal based memories, Appl. Phys. Lett. 89 (2006) 193505

  • Röntzsch, L., Heinig, K.-H., Schmidt, B., Mücklich, A. Experimental evidence of Si nanocluster d-layer formation in the vicinity of ion-irradiated SiO2-Si interfaces, Nucl. Instr. Meth. B 242 (2006) 149

  • Schmidt, B., Heinig, K.-H., Röntzsch, L., Müller, T., Stegemann, K.-H., Votintseva, E. Ion irradiation through SiO2/Si-interfaces: non-conventional fabrication of Si nanocrystals for memory applications, Nucl. Instr. Meth. B 242 (2006) 146

 

2005

 

  • Beyer, V., Borany, J. von Ion-beam synthesis of nanocrystals for multidot memory structures, in: Materials for Information Technology – Devices, Interconnects and Packaging; Series: Engineering Materials and Processes (Eds. E.Zschech, C. Whelan, T. Mikolajick), Springer-Verlag, Berlin, 2005, ISBN: 1-85233-941-1, pp. 139 – 147
  • Cantelli, V., Borany, J. von, Mücklich, A., Schell, N. Investigation of the formation and phase transition of small Ge and Co nanoparticles in a SiO2 matrix, Nucl. Instr. Meth. B 238 (2005) 268
  • Dimitrakis, P., Normand, P., Vontintseva, E., Stegemann, K.-H., Heinig, K.-H., Schmidt, B. Memory devices obtained by Si+ irradiation through poly-Si/SiO2 gate stack, J. Phys.: Conf. Ser. 10 (2005) 7
  • Johnson, S., Markwitz, A., Rudolphi, M., Baumann, H., Kuo, P.-Y., Blaikie, R., Mücklich, A. Effect of crystal orientation on self-assembled silicon nanostructures formed by electron beam annealing, J. Appl. Phys. 97 (2005) 94301
  • Kurmaev, E.Z., Zatsepin, D.A., Cholakh, S.O., Schmidt, B., Harada, Y., Tokushima, T., Osawa, H., Shin, S., Takeuchi, T. Iron nanoparticles in amorphous SiO2: x-ray emission and absorption spectra, Phys. of The Solid State 47 (2005) 754
  • Röntzsch, L., Heinig, K.-H., Schmidt, B., Mücklich, A., Möller, W., Thomas, J., Gemming, T. Direct evidence of self-aligned Si nanocrystals formed by ion irradiation of Si/SiO2 interfaces, Phys. Status Solidi A 202 (2005) R170
  • Oswald, S., Schmidt, B., Heinig, K.-H. Influence of sputtering conditions and electron energy on XPS depth profiling of Ge in SiO2, Cryst. Res. Technol. 40 (2005) 1134

 

2004

 

  • Beyer, R., Beyreuther, E., Borany, J. von, Weber, J. Scanning capacitance microscopy and spectroscopy on SiO2 films with embedded Ge and Si nanoclusters, Microel. Eng. 72 (2004) 207

  • Bonafos, C., Carrada, M., Cherkashin, N., Coffin, H., Chassaing, D., Ben Assayag, G., Claverie, A., Müller, T., Heinig, K.-H., Perego, M., Fanciulli, M., Dimitrakis, P., Normand, P. Manipulation of 2D arrays of Si nanocrystals embedded in thin SiO2 layers by low energy ion implantation, J. Appl. Phys. 95 (2004) 5696

  • Heitmann, J., Müller, F., Yi, L., Zacharias, M., Kovalev, D., Eichhorn, F. Excitons in Si nanocrystals: confinement and migration effects, Phys. Rev. B 69 (2004) 5309

  • Müller, T., Bonafos, C., Heinig, K.-H., Tencé, C., Coffin, H., Cherkashin, N., Ben Assayag, G., Schamm, S., Zanchi, G., Colliex, C., Möller, W., Claverie, A. Multi-dot floating-gates in MOSFETs for nonvolatile memories - their ion beam synthesis and morphology, Appl. Phys. Lett. 85 (2004) 2373

  • Röntzsch, L., Heinig, K.-H., Schmidt, B. Experimental evidence of Si nanocluster delta-layer formation in buried and thin SiO2 films induced by ion irradiation, Mat. Sci. in Semicond. Proc. 7 (2004) 357

 

2003

 

  • Bernas, H., Halley, D., Heinig, K.-H., Attane, J.-P., Ravelosona, D., Marty, A., Auric, P., Chappert, C., Samson, Y. Ordering intermetallic alloys by ion irradiation: a way to tailor magnetic media, Phys. Rev. Lett. 91 (2003) 77203

  • Heitmann, J., Kovalev, D., Schmidt, M., Yi, L.X., Scholz, R., Eichhorn, F., Zacharias, M. Synthesis and size control of Si nanocrystals by SiO/SiO2 superlattices and Er doping, Mat. Res. Soc. Symp. Proc. 737 (2003) 271

  • Müller, T., Heinig, K.-H., Möller, W. Nanocrystal formation in Si implanted thin SiO2 layers under the influence of an absorbing interface, Mat. Sci. Eng. B 101 (2003) 49

  • Nylandsted Larsen, A., Kanjilal, A., Lundsgaard Hansen, J., Gaiduk, P., Cherkashin, N., Claverie, A., Normand, P., Kapelanakis, E., Tsoukalas, D., Heinig, K.-H. Germanium quantum dots in SiO2: fabrication and characterization, in: Physics, Chemistry and Application of Nanostructures, Eds. V.E. Borisenko, S.V. Gaponenko, V.S. Gurin (World Scientific Singapore 2003) p.439

  • Schmidt, J.U., Schmidt, B. Investigation of Si nanocluster formation in sputter-deposited silicon sub-oxides for nanocluster memory structures, Mat. Sci. Eng. B 101 (2003) 28

  • Skorupa, W., Rebohle, L., Gebel, T. Group-IV nanocluster formation by ion beam synthesis, Appl. Phys. A 76 (2003) 1049

  • Spiga, S., Franciulli, M., Ferretti, N., Boscherini, F., d’Acapito, F., Ciatto, G., Schmidt, B., Formation and structure of Sn and Sb nanoclusters in thin SiO2 films, Nucl. Instr. Meth. B 200 (2003) 171

  • Spiga, S., Montovan, R., Franciulli, M., Ferretti, N., Boscherini, F., Schmidt, B., Grötzschel, R., Mücklich, A. Local structure of Sn implanted in thin SiO2 films, Phys. Rev. B 68 (2003) 205419

  • Wellner, A., Paillard, V., Bonafos, C., Coffin, H., Claverie, A., Schmidt, B., Heinig, K.-H. Stress measurements of germanium nanocrystals embedded in silicon oxide, J. Appl. Phys. 94 (2003) 5639

 

2002

 

  • Borany, J. von, Gebel, T., Stegemann, K.-H., Thees, H.-J., Wittmaack, M. Memory properties of Si+ implanted gate oxides: From MOS to nv-SRAM, Solid-State Electron. 46 (2002) 1729

  • Klimenkov, M., Borany, J. von, Matz, W., Grötzschel, R., Herrmann, F. Formation of a single interface-near, d-like Ge nanocluster band in thin SiO2 films using ion-beam synthesis, J. Appl. Phys. 91 (2002) 10062

  • Klimenkov, M., Borany, J. von, Matz, W., Eckert, D., Wolf, M., Müller, K.-H. Structure and magnetic properties of Co nanoclusters fabricated by ion beam synthesis in SiO2 films, Appl. Phys. A 74 (2002) 571

  • Müller, T., Heinig, K.-H., Möller, W. Size and location control of Si nanocrystals at ion beam synthesis in thin SiO2 films, Appl. Phys. Lett. 81 (2002) 3049

  • Müller, T., Heinig, K.-H., Schmidt, B. Template-directed self-assembly of buried nanowires and the pearling instability, Mat. Sci. Eng. C 19 (2002) 209

  • Schmidt, B., Grambole, D., Herrmann, F. Impact of ambient atmosphere on as-implanted amorphous insulating layers, Nucl. Instr. Meth. B 191 (2002) 482

 

2001

 

  • Borodin, V.A., Heinig, K.-H., Schmidt, B., Oswald, S. Oxidation of Ge implanted into SiO2 layers: Modeling and XPS, Nucl. Instr. Meth. B 178 (2001) 115

  • Gebel, T., Borany, J. von, Thees, H.-J., Wittmaack, M., Stegemann, K.-H., Skorupa, W. Non-volatile memories based on Si+ – implanted Gate oxides, Microel. Eng.59 (2001) 247

  • Heinig, K.-H., Schmidt, B., Strobel. M., Bernas, H. Inverse Ostwald Ripening and self-organization of nanoclusters due to ion irradiation, Mat. Res. Soc. Proc. 650 (2001) R9.6.1

  • Heinig, K.-H., Schmidt, B., Strobel, M., Bernas, H. Inverse Ostwald ripening and self-organization of nanoclusters due to ion irradiation, Mat. Res. Soc. Proc. 647 (2001) O14.6

  • Klimenkov, M., Matz, W., Nepijko, S., Lehmann, M. Crystallisation of Ge nanoclusters in SiO2 caused by electron irradiation in TEM, Nucl. Instr. Meth. B179 (2001) 209

  • Klimenkov, M., Borany, J.von., Matz, W., Eckert, J., Wolf, M., Müller, K.-H. Structure and magnetic properties of Co nanoclusters fabricated by ion beam synthesis in SiO2 films, Appl. Phys. A73 (2001)

  • Müller, T., Heinig, K.-H., Schmidt, B. Formation of Ge nanowires in oxidized silicon V-grooves by ion beam synthesis, Nucl. Instr. Meth. B175-177 (2001) 468

  • Müller, T., Heinig, K.-H., Schmidt, B. Shape evolution of oxidized silicon V-grooves during high dose ion implantation, Nucl. Instr. Meth. B 178 (2001) 109

  • Müller, T., Schmidt, B., Heinig, K.-H., Mücklich, A., Möller, W. Synthesis of spatially controlled nanostructures by ion implantation in V-grooves on (001)Si surfaces, Mat. Res. Soc. Proc. 647 (2001) O10.2

  • Rizza, G.C., Strobel, M., Heinig, K.-H., Bernas, H. Ion irradiation of gold inclusions in SiO2: Experimental evidence for inverse Ostwald ripening, Nucl. Instr. Meth. B 178 (2001) 78

  • Schmidt, B., Heinig, K.-H., Mücklich, A. Evolution of ion beam synthesized Au nanoclusters in SiO2 under ion irradiation, Mat. Res. Soc. Proc. 647 (2001) O11.20.1

  • Spiga, S., Ferrari, S., Fanciulli, M., Schmidt, B., Heinig, K.-H., Grötzschel, R., Mücklich, A., Pavia, G. Kinetics of ion beam synthesis of Sn and Sb in SiO2 layers, Mat. Res. Soc. Proc. 647 (2001) 011.23.1

  • Strobel, M., Heinig, K.-H., Michely, T. Mechanisms of pit coarsening in ion erosion of fcc(111) surfaces: a kinetic 3D lattice Monte-Carlo study, Surf. Sci. 486 (2001) 136

  • Strobel, M., Heinig, K.-H., Michely, T. Three-dimensional kinetic lattice Monte-Carlo simulation of ion erosion of fcc(111) surfaces, Nucl. Instr. Meth. B 178 (2001) 105

  • Strobel, M., Heinig, K.-H., Möller, W. Three-dimensional domain growth on the size scale of the capillary length: Effective growth exponent and comparative atomistic and mean field simulations, Phys. Rev. B 64 (2001) 245422

  • Strobel, M., Heinig, K.-H., Möller, W. Understanding ion beam synthesis of nanostructures: Modeling and atomistic simulations, Mat. Res. Soc. Proc. 647 (2001) O2.3

 

2000

 

  • Klimenkov, M., Matz, W., Borany, J. von In situ observation of electron-beam-induced ripening of Ge clusters in thin SiO2 layers, Nucl. Instr. Meth. B 168 (2000) 367
  • Oswald, S., Schmidt, B., Heinig, K.-H. XPS investigation with factor analysis for the study of Ge clustering in SiO2, Interface Anal. 29 (2000) 249
  • Thees, H.-J., Wittmaack, M., Stegemann, K.-H., Borany, J. von, Heinig, K.-H., Gebel, T. Microstructure and electrical properties of gate SiO2 containing Ge nanoclusters for memory applications, Microel. Reliability 40 (2000) 867

 

Conference contributions

 

2010

 

  • Heinig, K.-H.; Schmidt, B.; Mücklich, A.; Akhmadaliev, C.; Ridgeway, M.; Kluth, P.; Vredenberg, A.
    Au and Ge Nanoparticle Shaping by Swift Heavy Ion Irradiation,
    Workshop Ion Beam Physics, 29.-31.03.2010, Dresden-Rossendorf, Germany
  • Wiest, F.; Eggert, T.; Fojt, R.; Höllt, L.; Knobloch, J.; Pahlke, A.; Pahlke, S.; Stötter, R.; Schmidt, B.; Lange, H.
    Silicon Sensors realized by KETEK in Co-operation with FZD,
    Workshop Ion Beam Physics, 29.-31.03.2010, Dresden-Rossendorf, Germany
  • Schmidt, B.; Haberjahn, M.; Lange, H.; Hanf, D.
    Ion-implanted Silicon detectors ­ - Silicon Strip Detectors,
    1st SPIRIT Workshop on New detector technologies for advanced materials research using ion beam analysis, 25.-26.10.2010, Plitvice Lakes National Park, Croatia
  • Bischoff, L.; Heinig, K.-H.; Schmidt, B.; Facsko, S.; Pilz, W.
    Self-organization of Ge nanopattern under erosion with heavy Bi monomer and cluster ions,
    17th International Conference on Ion Beam Modification of Material - IBMM 2010, 22.-77.08.2010, Montreal, Canada
  • Schmidt, B.; Heinig, K.-H.; Mücklich, A.; Akhmadaliev, C.; Ridgway, M.; Kluth, P.
    Swift Heavy Ion Beam Shaping of Au and Ge Nanoparticles in SiO2,
    21st International Conference on the Application of Accelerators in Research and Industry (CAARI 2010), 08.-13.08.2010, Dallas/Fortworth, Texas, USA
  • Schmidt, B.; Heinig, K.-H.
    Ion Beam synthesis of Nano-crystals for Electronics and Photonics,
    21st International Conference on the Application of Accelerators in Research and Industry (CAARI 2010), 08.-13.08.2010, Dallas/Fortworth, Texas, USA
  • Bischoff, L.; Heinig, K.-H.; Schmidt, B.; Facsko, S.; Pilz, W.
    Crystalline Ge surface nanopatterns by erosion with heavy Bi-dimer and trimer ions,
    21th International Conference on the Application of Accelerators in Research and Industry CAARI 2010, 08.-13.08.2010, Fort Worth, USA
  • Schmidt, B.; Heinig, K.-H.; Beyer, V.
    Memory and electroluminescence properties of silicon nanocrystal MOS-FETs,
    18th International Conference on Ion implantation Technology (IIT 2010), 06.-11.06.2010, Kyoto, Japan

 

2009

 

  • Heinig, K.-H.
    Fundamentals of ion beam synthesis of nanostructures,
    Formation of nanodots, nanowires, wormholes etc. driven by capillary forces-reaction pathways predicted by atomistic simulations,
    Spontaneous formation of regular nanopattern on surfaces during thin film deposion and ion beam erosion,
    3 Talks given at Winter School on Nanoelectronics and Nanophotonics, 19.-25.01.2009, Ankara, Turkey
  • Heinig, K.-H.; Beyer, V.; Schmidt, B.; Stegemann, K.-H.
    Novel LEFET with two self-aligned Si nanocrystal layers
    Workshop on Nanoelectronics and Nanophotonics, 26.-28.01.2009, Ankara, Turkey
  • Heinig, K.-H.; Liedke, B.; Numazawa, S.; Ranjan, M.; Möller, W.; Facsko, S.
    Ion-beam-assisted nanostructure formation – Atomistic reaction pathways
    International Conference on Ion-Surface Interactions 2009, 21.-25.08.2009, Zvenigorod, Russia
  • Heinig, K.-H.; Schmidt, B.; Vredenberg, A.; Polman, A.; Toulemonde, M.
    Shaping of Au and Ge nanoparticles in SiO2 with swift heavy ions
    International Workshop on Nanostructures in Silica, 6.-9.09.2009, Ivalo, Finland
  • Beyer, R.; Borany, J. von; Burghardt, H.
    Interface and border trap relaxation in Si/SiO2 structures with Ge nanocrystals examined by transient capacitance spectroscopy
    16th Conference of Insulating Films on Semiconductors, 29.06.-1.07.2009, Cambridge, United Kingdom
  • Beyer, R.; Borany, J. von
    Determination of size and density of embedded nanocrystals in SiO2 by scanning force microscopy using a tomographic approach
    15. Tagung Festkörperanalytik, 12.-16.07.2009, Chemnitz, Germany
  • Bischoff, L.; Schmidt, B.; Lange, H.; Donzev, D.
    Crossbeam processing for nano-structures on SOI substrates
    4th FIB-Workshop: Focused Ion Beams in Research, Science and Technology, 29.-30.06.2009, Halle/Saale, Germany
  • Bischoff, L.; Schmidt, B.; Lange, H.; Donzev, D.
    3D nanostructures by combined FIB and electron beam processing
    35th International Conference on Micro Nano Engineering 2009, 28.09.-1.10.2009, Ghent, Belgium
  • Heinig, K.-H.; Schmidt, B.
    Swift heavy ions: A tool for nanotechnology?
    Workshop Ionenstrahlphysik, 6.-8.04.2009, Jena, Germany
  • Liedke, B.; Heinig, K.-H.
    Competition ion beam mixing and phase separation: A novel program combining TRIM with kinetic Monte Carlo
    Workshop Ionenstrahlphysik, 6.-7.04.2009, Jena, Germany
  • Numazawa, S.; Heinig, K.-H.; Ranjan, M.; Facsko, S.
    Mechanisms of metal self-ordering at grazing PVD on ion-erosion-induced surface pattern
    Workshop “Nanoscale Modification of Surfaces and Thin Films”, 30.08.-3.09.2009, Rathen, Germany
  • Numazawa, S.; Heinig, K.-H.; Ranjan, M.; Facsko, S.
    Mechanisms of metal self-ordering at oblique PVD on nanopatterned surfaces, MRS 2009 Fall Meeting, 30.11.-4.12.2009, Boston MA, USA
  • Ogiewa, M.; Zier, M.; Schmidt, B
    Electrical Characterisation of USJs in doped Si
    DPG Frühjahrstagung 2009 der Sektion Kondensierte Materie, 22.-27.03.2009, Dresden, Germany
  • Schmidt, B.; Heinig, K.-H.; Beyer, V.; Stegemann, K.-H.
    Ion beam mixing as basic technology for a light-emitting silicon nanocrystal field-effect transistor
    Workshop Ionenstrahlphysik, 6.-8.04.2009, Jena, Germany
  • Schmidt, B.; Zier, M.; Potfajova, J.
    Ion implantation in AFM cantilever array fabrication
    54th Internationales Wissenschaftliches Kolloquium, Workshop „PRONANO”, 10.09.2009, Ilmenau, Germany

 

2008

 

  • Bischoff, L.; Schmidt, B.; Lange, H.; Donzev, D.
    Nano-structures for sensors on SOI by writing FIB implantation and subsequent anisotropic wet chemical etching
    16th International Conference on Ion Beam Modification of Materials, 30.08.-5.09.2008, Dresden, Germany
  • Bischoff, L.; Schmidt, B.; Lange, H.
    NEMS structures on SOI by writing FIB implantation and subsequent anisotropic wet chemical etching
    Workshop “Ionenstrahlphysik und Nanotechnologie”, 11.-12.04.2008, Darmstadt, Germany
  • Bolse, W.; Paulus, H.; Bolse, T.; Bischoff, L.
    Nano-structures made by swift heavy ions
    72. Jahrestagung der DPG und DPG Frühjahrstagung des Arbeitskreises Festkörperphysik, 25.-29.02.2008, Berlin, Germany
  • Fitting, H.-J.; Salh, R.; Kourkoutis, L.; Schmidt, B.
    Cluster growth and luminescence in ion-implanted silica
    14th European Microscopy Congress, 1.-5.09.2008, Aachen, Germany
  • Frank, A.; Zöllner, J.-P.; Sarov, Y.; Ivanov, Tz.; Klett, S.; Gotszalk, T.; Zielony, M.; Zawierucha, P.; Schmidt, B.; Zier, M.; Nikolov, N.; Engl, W.; Sulzbach, T.; Langlotz, E.; Dontsov, D.; Schott, W.; Rangelow, I. W.
    Investgation of crosstalk in cantilever arrays
    Eurosensors XXII, 7.-10.09.2008, Dresden, Germany
  • Gotszalk, T.; Zawierucha, P.; Woszczyna, M.; Zielony, M.; Ivanov, T.; Ivanova, K.; Volland, B. E.; Sarov, Y.; Persaud, A.; Dontzov, D.; Schmidt, B.; Nikolov, N.; Kostic, I.; Engl, W.; Sulzbach, T.; Mielczarski, J.; Kolb, S.; Pedreau, R.; Huq, S. E.; Edinger, K.; Fortagne, O.; Blom, H. O.; Rangelow, I. W.
    Application of self-actuated 32 cantilever array in atomic force surface measurements
    34th Micro and Nano Engineering Conference(MNE08), 15.-18.09.2008, Athens, Greece
  • Grenzer, J.; Bischoff, L.; Biermanns, A.
    X−ray investigations on CoSi2 nano wires manufactured by focused ion beam synthesis
    72. Jahrestagung der DPG und DPG Frühjahrstagung des Arbeitskreises Festkörperphysik, 25.-29.02.2008, Berlin, Germany
  • Grenzer, J.; Bischoff, L.; Biermanns, A.
    X−ray investigations on CoSi2 nano wires manufactured by focused ion beam synthesis
    9th Biennial Conference on High Resolution X-Ray Diffraction and Imaging (XTOP 2008), 15.-19.09.2008, Linz, Austria
  • Heinig, K.-H.; Röntzsch, L.
    Facetting morphology of crystallites under ion irradiation – a 3D kinetic lattice monte carlo study
    16th International Conference on Ion Beam Modification of Materials, 31.08.-5.09.2008, Dresden, Germany
  • Schmidt, B.; Heinig, K.-H.; Beyer, V.; Stegemann, K.-H.
    Electroluminescence in silicon nanocrystals fabricated by ion beam mixing and annealing of gate oxide/silicon interfaces
    E-MRS Spring Meeting, 26.-30.05.2008, Strasbourg, France
  • Schmidt, B.; Heinig, K.-H.; Mücklich, A.; Akhmadaliev, C.
    Shaping of nanospheres into disks and rods with swift heavy ions
    Workshop "Ionenstrahlphysik und Nanotechnologie", 11.-12.04.2008, Darmstadt-Wixhausen, Germany
  • Schmidt, B.; Heinig, K.-H.; Mücklich, A.; Akhmadaliev, C.
    Swift-heavy-ion-induced shaping of spherical Ge nanoparticles into disks and rods
    16th International Conference on Ion Beam Modification of Materials,  31.08.-5.09.2008, Dresden, Germany
  • Zier, M.; Schmidt, B.
    Fabrication of ultra-shallow p-n junctions in Si using fast and ultra-fast annealing
    16th International Conference on Ion Beam Modification of Materials 2008, 31.08.-5.09.2008, Dresden, Germany

 

2007

 

  • Schmidt, B., Bischoff, L., Akhmadaliev, C., Heinig, K.H., Röntzsch, L.
    Fabrication of nanostructures by FIB: cobalt disilicide nanowires in silicon
    AAMU/Huntsville Nanotechnology Meeting “Ion Beam Nanofabrication”, 21-22 May 2007, Huntsville, Alabama
  • Beyer, V.; Heinig, K.-H.; Schmidt, B.; Stegemann, K.-H.; Dimitrakis, P.
    Memory and luminescence properties of Si nanocrystals fabricated by ion beam mixing
    3rd International Workshop on Semiconductor Nanostructures (SEMINANO'07), 13.-16.06.2007, Bad Honnef, Germany
  • Bischoff, L.; Schmidt, B.; Akhmadaliev, Ch.
    Ion beam synthesis and patterning by FIB
    RUBion Workshop “Ionenstrahlen und Nanotechnologie”, 10.-11.05.2007, Bochum, Germany
  • Frank, A.; Zöllner, J.-P.; Sarov, Y.; Ivanov, Tz.; Rangelow, I. W.; Swiatkowski, M.; Gotszalk, T.; Nikolov, N.; Zier, M.; Schmidt, B.
    SPICE simulations of self-actuated piezoresistive cantilever arrays
    33rd International Conference on Micro- and Nano-Engineering (MNE07), 23.-26.09.2007, Copenhagen, Denmark
  • Heinig, K.-H.
    Exotisches Verhalten von Grenzflächen unter Ionenbestrahlung
    Workshop „Ionenstrahlphysik und Nanotechnologie“, 10.-11.05.2007, Bochum, Germany
  • Heinig, K.-H.; Röntzsch, L.
    Driving forces of ion-beam-induced nanopatterning
    Workshop on Nanopatterning via Ions, Photon Beam and Epitaxy, 23.-27.09.2007, Sestri Levante, Italy
  • Heinig, K.-H.; Röntzsch, L.; Schuller, J. A.; Brongersma, M. L.
    Thin film patterning by surface-plasmon-induced thermocapillarity
    Workshop on Nanopatterning via Ions, Photon Beam and Epitaxy, 23.-27.09.2007, Sestri Levante, Italy
  • Schmidt, B.
    Formung von Ge Nanopartikeln mit MeV Ionen
    Workshop „Ionenstrahlphysik und Nanotechnologie“, 10.-11.05.2007, Bochum, Germany

 

2006

 

  • Heinig, K.-H.
    Growth and modification of nanostructures with ion beams
    International Workshop on Nanostructured Materials (Nanomat 2006), 21.-23.06.2006, Antalya, Turkey

  • Heinig, K.-H.
    Synthesis of nanostructures with ion beams
    Nanotechnology Research Forum, Middle EastTechnicalUniversity, 16.-20.10.2006, Ankara, Turkey

  • Röntzsch, L.; Heinig, K.-H.; Akhmadaliev, Ch.; Bischoff, L.; Schmidt, B.
    Synthesis of nanowire structures using focused ion beams
    17th Symposium of the MRS-J, The Materials Research Society of Japan, 08.-10.12.2006, Tokyo, Japan

  • Schmidt, B.
    Nanostructures by ion beams
    Workshop on Ion Beam Studies of Nanomaterials: Synthesis, Modification and Characterization, 26.06.-01.07.2006, Trieste, Italy

  • Vredenberg, A.; Dawi, E.; Mink, M.; Heinig, K.-H.; Toulemonde, M.; Nordlund, K.; Kuronen, A.
    Shaping of nanometals by high energy ion beams
    Materials Research Society (MRS) Fall Meeting 2006, 27.11.-01.12.2006, Boston/MA, USA

  • Claverie, A.; Bonafos, C.; Ben Assayag, G.; Schamm, S.; Cherkashin, N.; Paillard, V.; Dimitrakis, P.; Kapetenakis, E.; Tsoukalas, D.; Muller, T.; Schmidt, B.; Heinig, K.-H.; Perego, M.; Fanciulli, M.; Mathiot, D.; Carrada, M.; Normand, P.
    Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation
    2nd International Conference on Diffusion in Solids and Liquids, 26.-28.07.2006, Aveiro, Portugal

  • Heinig, K.-H.; Müller, T.; Schmidt, B.
    Predictive process simulation of Si nanocluster layer formation by low-energy ion implantation
    MRS Spring Meeting 2006, 17.-21.04.2006, San Francisco, USA

  • Heinig, K.-H.; Röntzsch, L.
    Self-aligned doubly-stacked Si dots fabrication for improved data retention of nanocrystal memories
    European Materials Research Society (E-MRS) Spring Meeting 2006, 29.05.-02.06.2006, Nice, France

  • Heinig, K.-H.; Röntzsch, L.
    Doubly-stacked Si dots in SiO2 formed by ion beam mixing – a way to improve retention of nanocrystal memories
    15th International Conference on Ion Beam Modification of Materials, 18.-22.09.2006, Taormina, Italy

  • Heinig, K.-H.; Schmidt, B.; Müller, T.; Röntzsch, L.; Stegemann, K.-H.
    CMOS compatible bottom-up approach of multi-dot floating-gate nonvolatile memory fabrication.
    MRS Spring Meeting 2006, 17.-21.04.2006, San Francisco, USA

  • Heinig, K.-H.; Schmidt, B.; Müller, T.; Röntzsch, L.
    Nucleation and nanostructure formation at mixed interfaces
    Int. Workshop on Polymorphism in Condensed Matter, 13.-17.11.2006, Dresden, Germany

  • Heinig, K.-H.; Vredenberg, A.; Toulemonde, M.; Nordlund, K.
    Ion beam shaping of nanometals: process modeling and atomistic simulations of extreme conditions
    MRS Spring Meeting 2006, 20.-21.04.2006, San Francisco, USA

  • Heinig, K.-H.; Vredenberg, A.; Toulemonde, M.; Nordlund, K.
    Synthesis of aligned nanowire arrays by shaping of nanometals with swift heavy ions – modelling and atomistic simulations
    European Materials Research Society (E-MRS) Spring Meeting 2006, 29.05.-02.06.2006, Nice, France

  • Heinig, K.-H.; Vredenberg, A.; Toulemonde, M.; Nordlund, K.
    Mechanisms of swift-heavy-ion-assisted shaping of Au nanospheres into wires and their subsequent “Ostwald ripening”
    15th International Conference on Ion Beam Modification of Materials, 18.-22.09.2006, Taormina, Italy

  • Röntzsch, L.; Heinig, K.-H.
    Reaction pathways of a regular disintegration of nanowires by thermocapillarity
    DPG-Frühjahrstagung 2006, 27.-31.03.2006, Dresden, Germany

  • Röntzsch, L.; Heinig, K.-H.
    Search for reaction pathways of a CMOS-compatible fabrication of nanofluidic channels by means of atomistic computer simulations
    Materials Research Society (MRS) Spring Meeting, 17.-21.04.2006, San Francisco, USA

  • Röntzsch, L.; Heinig, K.-H.
    Size and position control of chains or arrays of nanoparticles by surface-plasmon-polariton-induced thermocapillarity
    Materials Research Society (MRS) Spring Meeting, 17.-21.04.2006, San Francisco, USA

  • Röntzsch, L.; Heinig, K.-H.
    Nanowire synthesis with focused ion beams: predictive atomistic simulations on the fabrication of functional nanowire structures
    European Materials Research Society (E-MRS) Spring Meeting 2006, 29.05.-02.06.2006, Nice, France

  • Röntzsch, L.; Heinig, K.-H.
    Predictive process simulation of the FIB-based fabrication of metallic nanoparticle waveguides
    Materials Research Society (MRS) Spring Meeting, 17.-21.04.2006, San Francisco, USA

  • Röntzsch, L.; Heinig, K.-H.
    Focused-ion-beam-based synthesis of semiconductor nanowires and functional structures – an atomistic computer simulation study
    Materials Research Society (MRS) Spring Meeting, 17.-21.04.2006, San Francisco, USA

  • Röntzsch, L.; Heinig, K.-H.
    Modeling of focused-ion-beam-based synthesis of nanowire structures
    15th International Conference on Ion Beam Modification of Materials, 18.-22.09.2006, Taormina, Italy

  • Schmidt, B.; Mücklich, A.; Röntzsch, L.; Heinig, K.-H.
    How do high energy heavy ions shape Ge nanoparticles embedded in SiO2?
    15th International Conference on Ion Beam Modification of Materials, 18.-22.09.2006, Taormina, Italy

  • Schmidt, B.
    Nanocluster Memories by Ion Beam Synthesis of Si in SiO2
    2nd Workshop “Hybrid Nanostructured Materials – Synthesis, Properties, Applications”, 8.-9.11.2006, DresdenGermany

  • Zier, M.; Schmidt, B.; Rangelow, I.; Ivanov, T.; Sarov, Y.; Dontsov, D.; Schott, W.
    Fabrication of ultra-shallow p-n junctions as piezoresistive sensors for AFM deflection sensing
    Micro- and Nanoengineering 2006, 17.-20.09.2006, Barcelona, Spain

 

2005

 

  • Heinig, K.-H.
    Modelling of ion-driven nanostructures
    14th Int. Summer School on Vacuum, Electron and Ion Technologies, Sunny Beach, Bulgaria, Sept 12 – 16, 2005

  • Heinig, K.-H., Müller, T., Röntzsch, L., Möller, W.
    Growth and taming of nanostructures with ion beams
    Int. Symp. on Trends in Nanoscience: Structure and Functions, Irsee, Germany, Oct 8 – 12, 2005

  • Möller, W., Heinig, K.-H., Müller, T., Röntzsch, L., Schmidt, B.
    Ion beam synthesis of nanostructures with keV/amu ions
    Indo-German Workshop "Synthesis and Modification of Nanostructured Materials by Energetic Ion Beams", New Delhi, India, Feb 21 – 24, 2005

  • Müller, T., Heinig, K.-H., Schmidt, B., Röntzsch, L., Stegemann, K.-H.
    Fabrication of Si nanocrystals for nonvolatile memories using ion beams
    1st Int. Workshop on Semiconductor Nanocrystals (SEMINANO), Budapest, Hungary Sept 10 – 12, 2005

  • Vredenberg, A., Polman, A., Kooi, B.J., Van Dillen, T., Heinig, K.-H., Toulemonde, M.
    Ion beam shaping of nanometals
    MRS Fall Meeting, Boston, MA, USA, Nov 27 – Dec 1, 2005

  • Heinig, K.-H.
    Mechanisms of ion beam shaping of metal nanoparticles
    MRS Fall Meeting, Boston, USA, MA, 27 – Dec 1, 2005

  • Heinig, K.-H., Bernas, H.
    Ion-irradiation-induced chemical ordering of intermetallic alloys: predictions based on atomistic simulations
    DPG-Frühjahrstagung, Berlin, Germany, March 4 – 9, 2005

  • Heinig, K.-H., Röntzsch, L.
    Theoretical study on reaction paths of formation and decay of 1D nanostructures
    DPG-Frühjahrstagung, Berlin, Germany, March 4 – 9, 2005

  • Röntzsch, L., Heinig, K.-H., Schmidt, B.
    Ion irradiation through SiO2-Si interfaces: TEM study of self-organized Si nanocrystals applicable in nonvolatile memories
    DPG-Frühjahrstagung, Berlin, Germany, March 4 – 9, 2005

  • Röntzsch, L., Heinig, K.-H.
    Atomistic computer simulations on ion beam synthesis and decay of single-crystalline nanowires
    DPG-Frühjahrstagung, Berlin, Germany, March 4 – 9, 2005

  • Röntzsch, L., Heinig, K.-H.
    Atomistic computer simulations on synthesis and stability of single-crystalline nanowires
    Treffen DFG-Schwerpunkt Nanodrähte und Nanoröhren, Fulda, Germany, May 2 – 4, 2005

  • Röntzsch, L., Heinig, K.-H.
    Ion beam synthesis of CoSi2 nanowires in Si and their stability - predictions of atomistic computer simulations
    E-MRS Spring Meeting, Strasbourg, France, May 31 – June 3, 2005

  • Röntzsch, L., Heinig, K.-H.
    Ion beam synthesis of single-crystalline nanowires and their stability – predictions of atomistic computer simulations
    25th GIF Conference, Dresden, Germany, June 20 – 23, 2005

  • Röntzsch, L., Heinig, K.-H.
    Predictions on ion-assisted synthesis of functional 1D-nanostructures using atomistic computer simulations
    14th Int. Summer School on Vacuum, Electron and Ion Technologies, Sunny Beach, Bulgaria, Sept 12 – 16, 2005

  • Röntzsch, L., Heinig, K.-H.
    Reaction pathways of ion beam synthesis and stability of monocrystalline nanowires
    1st Int. Workshop on Semiconductor Nanocrystals (SEMINANO), Budapest, Hungary, Sept 10 – 12, 2005

  • Schmidt, B., Heinig, K-.H., Röntzsch, L., Mücklich, A., Stegemann, K.-H., Votintseva, E., Klimenkov, M.
    Fabrication of Si nanocrystals for memory application by ion irradiation through SiO2/Si-interfaces
    DPG-Frühjahrstagung, Berlin, Germany, March 4 – 9, 2005

  • Vredenberg, A., Polman, A., Kooi, B.J., Van Dillen, T., Heinig, K.-H., Toulemonde, M.
    Ion beam shaping of nanometals
    6th Int. Symp. on Swift Heavy Ions in Matter, Aschaffenburg, Germany, May 28 – 31, 2005

 

2004

 

  • Heinig, K.-H., Müller, T., Röntzsch, L.
    Atomistic simulations of nanofabrication with ion beams
    7th Int. Conf. on Computer Simulation of Radiation Effects in Solids, Helsinki, Finland, June 28–July 2, 2004

  • Heinig, K.-H., Röntzsch, L., Bernas, H.
    Ion-irradiation-induced chemical ordering of intermetallic alloys – predictions based on atomistic simulations
    14th Int. Conf. on Ion Beam Modification of Materials, Monterey, USA, Sept 5–10, 2004

  • Heinig, K.-H.
    Computer experiments of nanoshaping
    Int. Workshop on Ion Beam Shaping of Nanometals, Amsterdam, Netherlands, Dec 17, 2004

  • Möller, W., Heinig, K.-H., Müller, T., Röntzsch, L., Schmidt, B.
    Self-organisation of nanostructures driven by ion irradiation
    IWINP, Shanghai, China, March 11–13, 2004

  • Bonafos, C., Cherkashin, N., Carrada, M., Coffin,H., Ben Assayag, G., Schamm, S., Dimitrakis, P., Normand, P., Perego, M., Fanciulli, M., Müller, T., Heinig, K.-H., Argawal, A, Claverie, A.
    Manipulation of 2D arrays of Si nanocrystals by ultra-low-energy ion beam-synthesis for nonvolatile memories applications
    MRS Fall Meeting, Boston, USA, Nov 29–Dec 3, 2004

  • Dimitrakis, P., Normand, P., Vontintseva, E., Stegemann, K.-H., Heinig, K.-H., Schmidt, B.
    Memory devices obtained by Si+ irradiation through poly-Si/SiO2 gate stack
    2nd Conf. on Microsystems, Microelectronics and Nanotechnology, Athene, Greece, Nov 11–17, 2004

  • Müller, T., Heinig, K.-H., Bonafos, C., Coffin, H., Ben Assayag, G., Schamm, S., Zanchi, G., Claverie, A., Tencé, M., Colliex, C.
    Multi-dot floating-gates in MOSFETS for nonvolatile memories – their ion beam synthesis and morphology
    DPG Frühjahrstagung, Regensburg, Germany, March 8–12, 2004

  • Perego, M.,Ferrari, S., Fanciulli, M., Soncini, V., Mathiot, D., Heinig, K.-H., Müller, T., Schmidt, B., Normand, P., Dimitrakis, P., Kapetanakis, E., Ben Assayag, G., Bonafos, C., Carrada, M., Claverie, A.
    2D-arrays of Si nanocrystals embedded in thin SiO2layers for new memory devices
    Silicon Workshop, Genova, Italy, Feb 11, 2004 INFM Workshop, Genova, Italy, June, 2004

  • Röntzsch, L., Heinig, K.-H., Schmidt, B.
    Experimental evidence of Si nanocluster delta-layer formation in buried and thin SiO2 films induced by ion irradiation
    E-MRS Spring Meeting, Strasbourg, France, May 26, 2004

  • Röntzsch, L., Heinig, K.-H., Schmidt, B., Mücklich, A.
    Experimental evidence of Si nanocluster delta-layer formation in the vicinity of ion-irradiated SiO2-Si interfaces
    14th Int. Conf. on Beam Modification of Materials, Monterey, USA, Sept 5–10, 2004

  • Röntzsch, L., Heinig, K.-H., Schmidt, B.
    Evidence of self-aligned Si nanocluster delta-layers in buried SiO2 films induced by ion irradiation
    EURESCO Conf. on Cluster Systems and Nanotubes, Giens, France, May 8–12, 2004

  • Röntzsch, L., Heinig, K.-H., Schmidt, B.
    Evidence of self-aligned Si nanocluster delta-layers in buried SiO2 films induced by ion irradiation
    Int. School on Radiation Effects in Solids, NATO and the Ettore Majorana Centre, Erice, Italy, July 17–29, 2004

  • Röntzsch, L., Heinig, K.-H., Schmidt, B.
    Self-organization of nanocluster delta-layers at ion-beam mixed Si-SiO2 interfaces
    DPG Frühjahrstagung, Regensburg, Germany, March 8–12, 2004

  • Schmidt, B., Heinig, K.-H., Röntzsch, L., Müller, T., Stegemann, K.-H., Votintseva, E.
    Ion irradiation through SiO2/Si-interfaces: non-conventional fabrication of Si nanocrystals for memory applications
    14th Int. Conf. on Beam Modification of Materials, Monterey, USA, Sept 5–10, 2004

 

2003

 

  • Claverie, A., Bonafos, C., Carrada, M., Benassayag, G., Chassaing; D., Normand, P., Dimitrakis, P., Kapetanakis, E., Müller, T., Heinig, K.-H., Perego, M., Fanciulli, M., Soncini, V.,Mathiot, D.,
    Materials science issues for the fabrication of 2D-arrays of Si nanoparticles embedded in ultrathin SiO2 layers: towards high performance structures,
    33rd Europ. Solid-State Devices Research Conference, Satellite Workshop on Non-volatile memories with discrete storage nodes, Estoril, Portugal, Sept 16–18, 2003

  • Claverie, A., Bonafos, C., Ben Asssayag, G., Normand, P., Tsoukalas, D., Soncini, V., Heinig, K.-H., Fanciulli, M., Mathiot, D.,
    Ion implantation enters the nano-world: the NEON project,
    4th Int. Conf. on Intelligent Processing and Manufacturing of Materials, Sendai, Japan

  • Heinig, K.-H., Schmidt, B., Röntzsch, L.,Müller, T., Stegemann, K.-H., Votintseva, E., Stein, L., Wittmaack, M., Sauermann, E., Fanciulli, M., Perego, M., Normand, P., Dimitrakis, P., Bonafos, C., Claverie, A.,
    Non-conventional fabrication of Si nanocrystals in the gate oxide: ion irradiation through an oxide buried under the poly-Si gate,
    33rd Europ. Solid-State Devices Research Conference, Satellite Workshop on Non-volatile memories with discrete storage nodes, Estoril, Portugal, Sept 16–18, 2003

  • Möller, W., Schmidt, B., Heinig, K.-H.,
    Nanocrystals by ion beams - from fundamentals to application in non-volatile memories,
    Int. Conf. Nanofair 2003, Dresden, Germany, Nov 20–21, 2003

  • Bernas, H., Attane, J.P., Heinig, K.-H., Halley, D., Marty, A., Auric, P., Ravelosona, D., Chappert, C., Samson, Y.,
    Ion irradiation ordering of intermetallic alloys for magnetic media,
    MRS Fall Meeting, Boston, USA, Dec 1–5, 2003

  • Bernas, H., Halley, D., Heinig, K.-H., Attane, J.-Ph., Ravelosona, D., Marty, A., Auric, P., Chappert, C., Samson, Y.,
    Post-growth ordering of magnetic intermetallic alloy nanostructures by ion irradiation,
    MRS Spring Meeting, San Francisco, USA, Apr 21–25, 2003

  • Beyer, R., Beyer, V., Borany, J. von, Weber, J.,
    Ladungsrelaxation in MOS-Strukturen mit Ge Nanoclustern,
    DPG-Frühjahrstagung, Dresden, Germany, March 24–28, 2003

  • Beyer, R., Beyreuther, E., Borany, J. von, Weber, J.,
    Scanning capacitance microscopy and spectroscopy on SiO2 films with embedded Ge and Si nanoclusters,
    13th Bi-annual Conf. on Insulating Films on Semiconductors, Barcelona, Spain, June 18–20, 2003

  • Beyer, V., Borany, J. von, Knobloch, K., Mücklich, A.,
    Comparison of the charge storage properties of ion beam sythesized Si and Ge nanoclusters in thin gate oxides,
    E-MRS Spring Meeting, Strasbourg, France, June 10–13, 2003, EUROMAT 2003 Lausanne, Switzerland, Sept 1–5, 2003

  • Beyer, V., Müller, T., Borany, J. von, Heinig, K.-H.,
    Ion beam sythesized Au nanocrystals in ultra-thin SiO2,
    DPG-Frühjahrstagung, Dresden, Germany, March 24–28, 2003

  • Beyreuther, E., Beyer, R., Beyer, V., Borany, J. von, Weber, J.,
    Examination of the charge storage of Si- and Ge nanoclusters in SiO2 films by scanning probe techniques,
    DPG-Frühjahrstagung, Dresden, Germany, March 24–28, 2003

  • Beyreuther, E., Beyer, R., Borany, J. von, Weber, J.,
    Charge storage in SiO2 layers with embedded nanoclusters studied by scanning capacitance microscopy,
    12th Int. Conf. on Scanning Tunneling Microscopy/Spectroscopy and Related Techniques, Eindhoven, The Netherlands, July 21–25, 2003

  • Heinig, K.-H., Schmidt, B., Müller, T., Fanciulli, M., Perego, M.,
    Post-irradiation penetration of H218O humidity into nanoscale SiO2 films,
    E-MRS Spring Meeting, Strasbourg, France, June 10–13, 2003

  • Heinig, K.-H., Bernas, H., Attane, J.-Ph., Marty, A., Auric, P., Halley, D., Samson, Y., Ravelosona, D., Chappert, C.,
    Inducing chemical ordering and enhancing magnetic anisotropy in FePt and FePd by ion irradiation - an atomistic computer simulation study,
    MRS Fall Meeting, Boston, MA, USA, Dec 1–5, 2003

  • Heinig, K.-H., Schmidt, B., Müller, T., Roentzsch, L., Stegemann, K.-H., Perego, M., Fanciulli, M.,
    Ion-irradiation-induced formation of Si nanocrystals in thin SiO2 layers sandwiched between c-Si/poly-Si,
    MRS Fall Meeting, Boston, MA, USA, Dec 1–5, 2003

  • Müller, T., Heinig, K.-H.,
    Optimizing nanocrystal synthesis for multi-dot floating-gates of novel non-volatile memories,
    E-MRS Spring Meeting, Strasbourg, France, June 10–13, 2003

  • Müller, T., Heinig, K.-H.,
    Percolation of electron tunneling between Si nanocrystals synthesized in thin SiO2 films by ion implantation,
    MRS Fall Meeting, Boston, USA, Dec 1–5, 2003

  • Müller, T., Heinig, K.-H., Bonafos, C., Coffin, H., Ben Assayag, G., Schamm, S., Zanchi, G., Claverie, A., Colliex, M., Tencé, C.,
    Multi-dot floating-gates in MOSFETs for nonvolatile memories – their ion beam synthesis and morphology,
    MRS Fall Meeting , Boston, USA, Dec 1–5, 2003

  • Röntzsch, L., Heinig, K.-H., Schmidt, B.,
    Imaging Si nanoclusters in thin SiO2 layers by XTEM using contrast enhancing decoration with Ge,
    Int. Conf. Trends in Nanotechnology, Salamanca, SpainSept 2003, 33rd Europ. Solid-State Devices Research Conference, Satellite Workshop on Non-volatile memories with discrete storage nodes, Estoril, Portugal, Sept 16–18, 2003

  • Schmidt, B.,
    Nanostructures by ion beam synthesis,
    13th Int. Summer School on Vacuum, Electron and Ion Technologies, Varna, Bulgaria, Sept 15–19, 2003

 

2002

 

  • Heinig, K.-H., Müller, T., Schmidt, B., Strobel, M., Möller, W.,
    Surfaces and interfaces under ion bombardment – growth and taming of nanostructures,
    DPG Frühjahrstagung, Regensburg, Germany, March 11 – 15, 2002

  • Heinig, K.-H., Schmidt, B., Müller, T.,
    Ion-irradiation-induced phenomena in SiO2 and at Si/SiO2 interfaces,
    104th Annual Meeting of The American Ceramic Society, St. Louis, USA, April 28–May 1, 2002

  • Bernas, H., Halley, D., Heinig, K.-H., Attané, J.P., Marty, A., Auric, P., Ravelosona, D., Chappert, C., Samson, Y., Tailoring magnetic nanostructures by ion irradiation,
    Int. Workshop on Nanostructures for Electronics and Optics (NEOP), Dresden, Germany, Oct 6–9, 2002

  • Beyer, V., Müller, T., Borany, J. von, Heinig, K.-H.,
    Ion beam sythesized Au nanocrystals in ultra-thin SiO2,
    E-MRS Spring Meeting, Strasbourg, France, June 18-21, 2002

  • Beyer, V., Müller, T., Borany, J. von, Heinig, K.-H.,
    Charge storage behavior of ion beam synthesized Au nanocrystals,
    Intern. Workshop on Nanostructures for Electronics and Optics (NEOP), Dresden, Germany, Oct 6-9, 2002

  • Borany, J. von, Schmidt, B., Heinig, K.-H., Mücklich, A., Grambole, D.,
    Technological challenges for the ion beam synthesis of semiconductor nanoclusters in thin gate dielectrics,
    14th Int. Conf. on Ion Implantation Technology (IIT 2002), Taos, NM, USA, Sept 22-27, 2002

  • Borodin, V.A., Heinig, K.-H.,
    Thermally activated nanocluster evolution in reactive environment,
    Int. Workshop on Nanostructures for Electronics and Optics (NEOP), Dresden, Germany, Oct 6–9, 2002

  • Heinig, K.-H., Schmidt, B., Borany, J. von, Stegemann, K.-H., Müller, T.,
    Nanocrystals in gate oxides by ion beam synthesis – Fundamentals and applications in non-volatile memories,
    E-MRS Spring Meeting, Strasbourg, France, June 18-21, 2002

  • Müller, T., Heinig, K.-H., Möller, W.,
    Nanocluster formation by phase separation in ultra-thin ion implanted gate oxides,
    E-MRS Spring Meeting, Strasbourg, France, June 18–21, 2002

  • Müller, T., Heinig, K.-H.,
    Regular chains of nanocrystals fabricated from nanowires – predictions based on kinetic MC simulations,
    E-MRS Spring Meeting, Strasbourg, France, June 18–21, 2002

  • Müller, T., Heinig, K.-H., Möller, W.,
    Nanocluster synthesis by high-fluence ion implantation in thin films studied by MC simulations,
    6th Int. Conf. on Computer Simulation of Radiation Effects in Solids (COSIRES 2002), Dresden, Germany, June 23-27, 2002

  • Müller, T., Heinig, K.-H., Möller, W.,
    Size and location control of Si nanocrystals at ion beam synthesis in thin gate oxides,
    Int. Workshop on Nanostructures for Electronics and Optics (NEOP), Dresden, Germany, Oct 6–9, 2002

  • Schmidt, B., Heinig, K.-H., Grambole, D., Herrmann, F., Perego, M.,
    Impact of moisture from ambient on ion beam synthesis of nanocrystals in thin SiO2 layers,
    Int. Workshop on Nanostructures for Electronics and Optics (NEOP), Dresden, Germany, Oct 6-9, 2002

  • Schmidt, J. U., Schmidt, B.,
    Investigation of Si nanocluster formation in sputter deposited silicon suboxides and application to nanocluster memory structures,
    E-MRS Spring Meeting, Strasbourg, France, June 18-21, 2002

  • Schmidt, J. U., Schmidt, B.,
    Si-nanocluster layers embedded in SiO2, preparation by sputtering and annealing of SiO2/SiOX stacks- electrical and optical characterization,
    Int. Workshop on Nanostructures for Electronics and Optics (NEOP), Dresden, Germany, Oct 6-9, 2002

  • Schmidt, J. U., Schmidt, B.,
    Si-nanocrystal memory devices prepared by r.f. magnetron sputtering,
    MRS Fall Meeting, Boston, USA, Nov 24-29, 2002

  • Spiga, S., Franciulli, M., Ferretti, N., Boscherini, F., Schmidt, B.,
    Formation and structure of Sn nanoclusters in thin SiO2 films,
    E-MRS Spring Meeting, Strasbourg, France, June 18-21, 2002

  • Spiga, S., Franciulli, M., Montavan, R., Boscherini, F., Ferretti, N., Schmidt, B., Grötzschel, R., Mücklich, A.,
    EXAFS and CEMS investigation of the local structure of Sn implanted SiO2,
    Silicon Workshop, INFM, Sede Genova, Italy, Feb 6-8, 2002

 

2001

 

  • Borany, J. von, Heinig, K.-H., Klimenkov, M., Rebohle, L., Schmidt, B., Skorupa, W., Stegemann, K.-H.,
    Ion beam synthesis of semiconductor nanoclusters in SiO2 films for opto- and microelectronic applications,
    12th Int. School VEIT´01, Varna, Bulgaria, Sept.17-21, 2001

  • Heinig, K.-H., Schmidt, B., Strobel, M., Bernas, H.,
    Inverse Ostwald ripening and self-organization of nanoclusters due to ion irradiation,
    E-MRS 2001 Spring Meeting, Strasbourg, France, June 5-8, 2001

  • Heinig, K.-H., Schmidt, B., Müller, T., Bernas, H.,
    Inverse Ostwald ripening,
    Gordon Research Conference, KimballUnionAcademy, Meriden, NH, USA, July 1 – 6, 2001

  • Heinig, K.-H., Schmidt, B., Müller, T., Bernas, H.,
    Effects of ion irradiation on metal and semiconductor nanostructures in SiO2,
    11th Conference on Radiation Effects in Insulators REI11, Lisbon, Portugal, Sept 3 – 7, 2001

  • Heinig, K.-H.
    Microstructural processes in ion irradiated materials,
    CECAM Workshop on Modelling Materials: From Atoms to Microstructures, Lyon, France, Sept. 18-21, 2001

  • Skorupa, W., Rebohle, L., Gebel, T.,
    Group-IV nanocluster formation by ion beam synthesis,
    31th Europ. SolidStateDevice Research Conf. (ESSDERC), Nürnberg, Sept.10-14, 2001

  • Borany, J. von, Gebel, T., Skorupa, W., Stegemann, K.-H., Thees, H.-J., Wittmaack, M.,
    Non-volatile memories based on Si+-implanted gate oxides,
    12th Conf. on Insulating Films on Semiconductors (INFOS’2001), Udine, Italy, June 20-23, 2001

  • Gebel, T., Rebohle, L., Zhao, J., Borany, J. von, Stegemann, K.H., Mrstik, B., Skorupa, W.,
    Ion beam synthesized group IV nanoclusters in SiO2 layers: a promising approach for non-volatile memories and silicon based light emitters,
    MRS Spring Meeting, San Francisco, USA, April 16-20, 2001

  • Heinig, K.-H., Schmidt, B., Müller, T.,
    Nanocluster formation: Atomistic simulations and impact of atmospheric moisture
    Projekttreffen NEON, CEMES/CNRS, Toulouse, France, Jan 31 – Feb 4, 2001

  • Heinig, K.-H., Schmidt, B., Müller, T.,
    Tailoring the size and size distribution of nanoclusters through ion irradiation
    Annual Meeting of the German Physical Society, Hamburg, March 26-30, 2001

  • Heinig, K.-H., Schmidt, B., Borany, J. von, Müller, T., Bernas, H.,
    Self-organization of nanostructures with ion beams
    E-MRS Spring Meeting, Strasbourg, France, June 5-8, 2001

  • Heinig, K.-H., Novikov, P.,
    Ion-irradiation stimulated Ge nanocluster formation in gate oxides containing GeO2,
    Projekttreffen NEON, Uni Århus, Denmark, August 19-21, 2001

  • Heinig, K.-H., Novikov, P., Larsen, A.N., Dvurechenskii, A.,
    Simulation of ion-irradiation stimulated Ge nanocluster formation in gate oxides containing GeO2,
    11th Conference on Radiation Effects in Insulators REI11, Lisbon, Portugal, Sept 3 – 7, 2001

  • Müller, T., Heinig, K.-H., Schmidt, B.,
    Template-directed ion beam synthesis of Ge nanowires using V-grooves,
    Annual Meeting of the German Physical Society, Hamburg, March 26-30, 2001

  • Müller, T., Heinig, K.-H., Schmidt, B.,
    Self-assembly of nanowires and pearling instability at ion beam synthesis,
    E-MRS 2001 Spring Meeting, Strasbourg, France, June 5-8, 2001

  • Schmidt, B., Grambole, D., Herrmann, F.,
    Impact of ambient atmosphere on as-implanted amorphous insulating layers,
    11th Int. Conf. on Radiation Effects in Insulators (REI-11), Lisbon, Portugal, Sept. 3-7, 2001

  • Schmidt, J., Schmidt, B.,
    Investigation of MOS structures with embedded Si-nanocrystals obtained by r.f. sputtering,
    12th Int. School VEIT 2001, Varna, Bulgaria, Sept 17-21., 2001

  • Schmidt, J., Schmidt, B., Beyer, V. H.,
    MOS-structures with embedded nanocrystalline silicon prepared by rf-sputtering,
    65. Physikertagung und Frühjahrstagung des Arbeitskreises Festkörperphysik (AKF) der DPG, Hamburg, March 26-30, 2001

 

2000

 

  • Borany, J. von, Gebel, T., Heinig, K. H., Klimenkov, M., Stegemann, K. H., Thees, H. J., Wittmaack, M.
    Ion beam synthesis of shallow Ge nanocluster bands in thin SiO2 films for non-volatile memory applications, IECON’2000, Nagoya, Japan, Oct. 23 - 27, 2000

  • Borodin, V.A.,Heinig, K.-H., Schmidt, B.,Oswald, S.,
    Modeling and XPS study of precipitation and oxidation of Ge in Ge+ implanted SiO2 layers,
    E-MRS 2000 Spring Meeting, Strasbourg, France, May 30 - June 2, 2000

  • Gebel, T., Borany, J. von, Klimenkov, M., Skorupa, W., Thees, H.-J., Wittmaack, M., Stegemann, K.-H.,
    Microstructural and electrical properties of SiO2 layers containing and Si nanoclusters,
    197th Meeting Electrochemical Society Toronto, Ontario, Canada, May 14-18, 2000

  • Gebel, T., Borany, J. von, Rebohle, L., Skorupa, W., Thees, H.-J., Wittmaack, M., Stegemann, K.-H.,
    Electrical characterization of thin SiO2 layers containing Ge/Si nanoclusters,
    NATO Advanced Study Institute “Defects in SiO2 and related Dielectrics: Science and Technology”, Erice, Italy, April 8-20, 2000

  • Gebel, T., Rebohle, L., Zhao, J., Borchert, D., Fröb, H., Borany, J. von, Skorupa, W., (invited)
    Ion beam synthesized based formation of Ge- rich thermally grown silicon dioxide layers: a promising approach for a silicon based light emitter,
    MRS Fall Meeting, Boston/MA, USA, Nov. 27 – Dec. 1, 2000

  • Gebel, T., Thees, H.-J., Borany, J. von, Wittmaack, M., Stegemann, K.-H., Skorupa, W.,
    Ion beam synthesis based formation of Si-and Ge-rich thermally grown silicon dioxide layers for memory applications,
    MRS Fall Meeting, Boston/MA, USA, Nov. 27 – Dec. 1, 2000

  • Heinig, K.-H., (invited)
    Atomic modelling of Ion Implantation Processes
    II, Second ENDEASD (European Network on Defect Engineering of Advanced Semiconductor Devices) Summer School, Kista-Stockholm, Sweden, June 24-26, 2000

  • Heinig, K.-H., Strobel, M.,
    Inverse Ostwald ripening under ion irradiation,
    E-MRS 2000 Spring Meeting, Strasbourg, France, May 30 - June 2, 2000

  • Heinig, K.-H., Strobel, M., Rizza, G., (invited)
    Nanocluster evolution under ion irradiation,
    12th Int. Conf. Ion Beam Modifications of Materials, Canela, Brazil, Sept. 3-8, 2000

  • Heinig, K.-H., Schmidt, B., Strobel, M., Bernas, H., (invited)
    Inverse Ostwald ripening and self-organization of nanoclusters due to ion irradiation,
    MRS 2000 Fall Meeting, Boston/MA, USA, Nov. 27–29, 2000

  • Klimenkov, M., Borany, J. von, Matz, W., Schulze, S.,
    Application of TEM energy filtered measurements to the study of Ge redistribution in ion-implanted thin SiO2 films,
    12th Europ. Congress on Electron Microscopy, Brno, CZ, July 9-14, 2000

  • Müller, T., Heinig, K.-H., Schmidt, B., Mücklich, A., Möller, W.,
    Shape evolution of oxidized silicon V-grooves during high dose ionimplantation,
    E-MRS 2000 Spring Meeting, Strasbourg, France, May 30 - June 2, 2000

  • Müller, T., Heinig, K.-H., Schmidt, B., Möller, W.,
    Formation of quantum wires in oxidized silicon V-grooves by ion beam synthesis,
    12th Int. Conf. Ion Beam Modifications of Materials (IBMM2000), Canela, Brazil, Sept. 3 - 8, 2000

  • Müller, T., Heinig, K.-H., Schmidt, B., Mücklich, A., Möller, W.,
    Synthesis of spatially controlled nanostructures by ion implantation in V-Grooves on (001) Si surfaces,
    MRS 2000 Fall Meeting, Boston/MA, USA, Nov. 27–29, 2000

  • Schmidt, B., Heinig, K.-H., Mücklich, A., Evolution of ion beam synthesized Au nanoclusters in SiO2 under ion irradiation, MRS 2000 Fall Meeting, Boston/MA, USA, Nov. 27 - 29, 2000

  • Spiga, S., Ferrari, S., Fanciulli, M., Schmidt, B., Heinig, K.-H., Grötzschel, R., Mücklich, A., Pavia, G.,
    Kinetics of ion beam synthesis of Sn and Sb clusters in SiO2 layers,
    MRS 2000 Fall Meeting, Boston/MA, USA, Nov. 27–29, 2000

  • Stegemann, K.-H., Thees, H.-J., Wittmaack, M., Borany, J. von, Heinig, K.-H., Gebel, T.,
    Microstructure and electrical properties of Ge- and Si-nanoclusters in implanted gate oxide for embedded memory applications,
    13th Int. Conf. Ion Implantation Technology (IIT 2000), Alpbach, Austria, Sept. 17-22, 2000

  • Strobel, M., Heinig, K.-H., Möller, W., (invited)
    Atomistic modeling of ion beam synthesis of nanostructures,
    E-MRS 2000 Spring Meeting, Strasbourg, France, May 30 - June 2, 2000

  • Strobel, M., Heinig, K.-H., Möller, W., (invited)
    A kinetic 3D lattice Monte-Carlo study of nucleation, growth, and Ostwald ripening of nanoclusters under ion irradiation,
    Second ENDEASD (European Network on Defect Engineering of Advanced Semiconductor Devices) Workshop, Kista-Stockholm, Sweden, June 27-29, 2000

  • Strobel, M., Heinig, K.-H., Möller, W., (invited)
    Understanding ion beam synthesis of nanostructures: modelling and atomistic simulations,
    MRS 2000 Fall Meeting, Boston/MA, USA, Nov. 27–29, 2000

 

Diploma theses

 


  • Tiefenprofilierung elektrischer Ladungsträger an ionenimplantierten Dotandenprofilen mittel stufenweiser Oxydationsprofilierung (SWOP)
    Westsächsische Hochschule Zwickau (FH), Jan. 2010
  • Mucke, S.
    Herstellung von Nanometer-Strukturen mittels feinfokussiertem Ionenstrahl (FIB)
    Hochschule Mittweida (FH), Feb 2004, Wissenschaftlich-Technische Berichte, FZR-402, Apr. 2004
  • Röntzsch, L.
    Self-organization of nanocluster delta-layers at ion-beam-mixed Si-SiO2 interfaces
    TU Dresden, Oct 2003 Wissenschaftlich-Technische Berichte, FZR-392, Oct. 2003
  • Hellwig, S.,
    Synthese von geordneten Kobaltsilizid-Nanoclustern für plasmonische Anwendungen
    TU Dresden, Jun. 2003
  • Müller, T. Ion beam synthesis of Ge naowires TU Dresden, Nov. 2000

 

PhD theses

 

  • Potfajova, J.
    Silicon based microcavity enhanced light emitting diodes
    TU Dresden, Dec. 15, 2009, Wissenschaftlich-Technische Berichte FZD-526 (2009).
  • Beyer, V.
    Nanocrystals for nanodot memories - Ion beam synthesis and electrical studies
    Leibniz Universität Hannover, Dec. 12, 2009
  • Röntzsch, L.
    Shape evolution of cylindrical nanostructures under quasi- and non-equilibrium driving forces
    TU Dresden, 2007, Aug. 14, .2007
  • Müller, T.
    Low energy ion beam synthesis of Si nanocrystals for nonvolatile memories – modeling and process simulations
    TU Dresden, Oct. 19, 2005
  • Schmidt, J.
    Synthesis of silicon nanocrystal memories by sputter deposition
    TU Dresden, Nov. 15, 2004

 

Patents

 

  • Schmidt, B., Heinig, K.-H. Verfahren zur Herstellung von Monolagen aus Silizium-Nanoclustern in Siliziumdioxyd Patent EP 1 070 768 B1 (2000 Patent DE 199 33 632 C2 (1999)

 

 
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