Flash lamp annealing

• several tools for
  • 100 mm
  • 150 mm
  • 200 x 300 nm
  • 1200 x 1200 mm (at Freiberg)
• Annealing gases: vacuum, N₂, Ar, O₂
• Pulse duration: 0.5-20 ms
• Preheating up to 1000°C
• Energy densities up to 150 Jcm^-2
• Temperatures up to 2000°C (depending on preheating and light absorption)

Responsible: T. Schumann

Magnetron sputtering

• Manufacturer: Rovak
• Dust-reduced environment
• up to 200 x 300 nm (carrier size)
• can be combined with in-situ FLA
• 75 mm sputter sources
  • Al, Cr, Cu, Fe, Ge, Mn, Ni, Si, Sn, Ti, TiN
  • multilayers with two sputtering sources
  • other metals on request
• 30 mm sputter source: Au

Responsible: T. Schumann

Plasma enhanced chemical vapour deposition (PECVD)

• Manufacturer: Oxford Instruments
• Dust-reduced environment
• up to 8 inch
• High temperature electrode up to 750°C
• Materials:
  • SiO₂
  • Si₃N₄, SiO_xN_y
  • amorphous or polycrystalline Si, Ge

Responsible: L. Rebohle

with FWIO: Atomic layer deposition (ALD)

• Manufacturer: Ultratech/CambridgeNanotechALD
• up to 4 inch
• Deposition temperature: 80 - 350°C
• Materials:
  • Al₂O₃, HfO₂, ZnO
  • mixed layers (on request)

Responsible: L. Rebohle (FWIM), T. Schönherr (FWIO)

Laser annealing: COMPexPRO 201

• Manufacturer: Coherent
• Pulsed laser (10 Hz)
• Wavelength: 308 nm
• Pulse duration:  30 ns
• Max. energy: 500 mJ per pulse

Responsible: S. Zhou

Glovebox

• Manufacturer: GS Systemtechnik GmbH
• Inert Ar ambient (O₂ and H₂O < 0.5 ppm)
• 2 working places
• Topic: assembly of Li ion battery cells

Responsible: C. Cherkouk

Hall effect measuring system HMS 9709A from LakeShore:

Measurement of electrical transport parameters (resistance, charge carrier density and mobility) as a function of temperature and the magnetic field.

• Temperature range: 2.5 - 400 K
• Maximum magnetic field: 9 T
• Maximum sample size: 13 x 16 mm²
• Current range: 1 pA - 100 mA
• resistance range: 40 µΩ - 200 GΩ

Responsible: S. Zhou

Resistance measurement

• 200 mm 4 Point Probe System Aitco CMT 2000
• 400 x 300 mm Flat Panel 4 Point Probe System Aitco CMT 3000

Responsible: T. Schumann

Optical measurement setups

• Photoluminescence
• Electroluminescence
• Transmission measurement for waveguides

Responsible: S. Prucnal, L. Rebohle

Quantum Design: SQUID-VSM

The MPMS SQUID VSM system is a highly sensitive magnetometer system that combines the sensitivity of a SQUID (Superconducting Interference Device) with the higher speed of a VSM (Vibrating Sample Magnetometer). One can measure very weak magnetic signal, both temperature and field dependence.

• Temperature range: 1.8 - 400 K
• Field range: from - 7 T to +7 T
• Sensitivity: 10^-7 - 10^-8 emu

Verantwortlich: S. Zhou