Nanotechnology
Lecturer: |
Dr. Artur Erbe |
Course Type: |
Semester Course, 2 SWS |
Start Date: |
15 October 2013 |
Schedule: |
Tuesdays, 07:30-09:00 |
Location: |
TU Dresden, PHY (Physik, Haeckelstr. 1-5), Room C118 |
Summary: |
The course gives an introduction into fabrication and characterization of nanoscale structures. Typical lithography methods like electron beam lithography and microscopy on the nanoscale are introduced. Applications of the nanostructures as sensors and electronic components are discussed. |
Language: |
English |
More info: | |
Notes: | - |