Contact

Dr. René Hübner
Electron Microscopy Laboratory
IBA/OSA
r.huebnerAthzdr.de
Phone: +49 351 260 - 3174
Fax: +49 351 260 - 13174

Analytical Transmission Electron Microscopy - Equipment - Titan 80-300 (FEI) - Talos F200X (FEI) - Topics of Research:...

Phase separation into percolated Si nanostructures in SiO2

BF-TEM Si-SiOx overview

Fig. 1. Cross-sectional TEM bright-field image of a Si-SiOx nano-composite layer deposited onto single-crystalline silicon.

BF-TEM Si-SiOx HRTEM

Fig. 2. High-resolution zero-loss image of the interface between the Si-SiOx nano-composite and the silicon substrate.

EFTEM Si-SiOx Si+SiOx

Fig. 3. Superposition of Si (green) and SiOx distributions (red) obtained by EFTEM.


Contact

Dr. René Hübner
Electron Microscopy Laboratory
IBA/OSA
r.huebnerAthzdr.de
Phone: +49 351 260 - 3174
Fax: +49 351 260 - 13174