Controlled doping of van der Waals crystals realized by low-energy ion implantation and millisecond-range intense pulse light annealing.

Title Controlled doping of van der Waals crystals realized by low-energy ion implantation and millisecond-range intense pulse light annealing.
Copyright HZDR/ Sahneweiß
Picture Id 63593
Date 16.06.2021
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