Site Map Ion Beam Cen­ter
FWIZ

• Ion Beam Cen­ter
  FWIZ
  • Ion implantation and modification of materials
    • 500 kV ion implan­ter
    • 40 kV ion implan­ter
    • Group members
    • Publications
  • Ion Accelerators
    • Accelerators
    • Available ions
    • Group members
    • Publications
  • Ion Beam Analysis
    • Rutherford Backscattering Spectrometry
    • Elastic Recoil Detection Analyis
    • Nuclear reaction analysis and quantitative hydrogen analysis
    • Analytical Ion Microbeam
    • Non-destructive Ion Beam Analysis for Archeometry and Art
    • Group members
    • Publications
  • Structure Analysis
    • Electron microscopy laboratory
      • Scanning Electron Microscopy
      • Analytical Transmission Electron Microscopy
    • X-ray Laboratory
    • Publications
    • Group members
  • Ion induced Nanostructures
    • Pattern formation by self-organization
    • Highly Charged Ions
    • Focused Ion Beams
    • Helium Ion Microscopy
    • Compu­ter Simulations
      • Crystal-TRIM
    • Setups
    • Group members
  • Process Technology and Devices
    • Clean Room
    • Wet chemistry
    • Photolithography
    • Reactive Ion Etching
    • Thermal Processing
    • Thin Film Deposition
    • Measurement techniques
    • Group Members
  • Atomistic Simulations of irradiation-induced Phenomena
    • Publications
    • Group members

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