Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

2 Publications

Oxygen gettering in the initial stage of SIMOX process

Ou, X.; Kögler, R.; Mücklich, A.; Skorupa, W.; Möller, W.; Wang, X.

The presentation reported latest results about defect engineering of the SIMOX process

Keywords: Silicon; Oxygen; SIMOX; SOI

  • Lecture (Conference)
    16th International Conference on Ion Beam Modification of Materials (IBMM 2008), 31.08.-05.09.2008, Dresden, Germany
  • Poster
    16th International Conference on Ion Beam Modification of Materials (IBMM 2008), 31.08.-05.09.2008, Dresden, Germany

Permalink: https://www.hzdr.de/publications/Publ-11880
Publ.-Id: 11880