Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
2 PublicationsOxygen gettering in the initial stage of SIMOX process
Ou, X.; Kögler, R.; Mücklich, A.; Skorupa, W.; Möller, W.; Wang, X.
The presentation reported latest results about defect engineering of the SIMOX process
Keywords: Silicon; Oxygen; SIMOX; SOI
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Lecture (Conference)
16th International Conference on Ion Beam Modification of Materials (IBMM 2008), 31.08.-05.09.2008, Dresden, Germany -
Poster
16th International Conference on Ion Beam Modification of Materials (IBMM 2008), 31.08.-05.09.2008, Dresden, Germany
Permalink: https://www.hzdr.de/publications/Publ-11880
Publ.-Id: 11880