Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationWriting implantation with a high current Focused Ion Beam to form CoSi2 - Microstructures
Bischoff, L.; Teichert, J.; Hesse, E.; Panknin, D.; Skorupa, W.
-
Lecture (Conference)
EIPB '94, New Orleans, 31.5.-3.6.1994
Permalink: https://www.hzdr.de/publications/Publ-195
Publ.-Id: 195