Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationPlasma immersion ion implantation of 3D-Objects
Mändl, S.; Günzel, R.; Möller, W.
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Lecture (Conference)
8th German Meeting on Plasma Technology, Dresden, Germany, Sept. 15 17, 1997
Permalink: https://www.hzdr.de/publications/Publ-2423
Publ.-Id: 2423