Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
2 PublicationsSimulations for impurity gettering in silicon by ion implantation induced defects
Heinig, K.-H.; Jäger, H.-U.
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Lecture (Conference)
Proc. First ENDEASD (European Network on Defect Engineering of Advanced Semiconductor Devices) Workshop, C. Claeys, (ed.), p. 294, Santorini, Greece, April 1999 -
Contribution to proceedings
Proc. First ENDEASD (European Network on Defect Engineering of Advanced Semiconductor Devices) Workshop, C. Claeys, (ed.), p. 294, Santorini, Greece, April 1999
Permalink: https://www.hzdr.de/publications/Publ-3127
Publ.-Id: 3127