Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationComputer simulation of defect evolution during high-energy ion implantation and subsequent annealing
Heinig, K.-H.; Jäger, H.-U.
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Lecture (Conference)
IUMRS-ICAM99 Conference, Symposium M: Si-based Materials and Devices, Beijing, China, June 13- 18, 1999
Permalink: https://www.hzdr.de/publications/Publ-3146
Publ.-Id: 3146