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Nitrogen Plasma Íon Implantation of Al Alloy in the High Voltage Glow Discharge Mode

Oliveira, R. M.; Ueda, M.; Rossi, J. O.; Reuther, H.; Lepienski, C. M.; Beloto, A. F.

Nitrogen Plasma Íon Implantation of Al Alloy in the High Voltage Glow Discharge Mode

  • Lecture (Conference)
    International Conference on Íon Implantation Technology, 11.-16.06.2006, Marseille, France

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Publ.-Id: 8773