Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Multimodal impurity redistribution and nanocluster formation in Ge implanted silicon dioxide films

von Borany, J.; Grötzschel, R.; Heinig, K.-H.; Markwitz, A.; Matz, W.; Schmidt, B.; Skorupa, W.

Permalink: https://www.hzdr.de/publications/Publ-916
Publ.-Id: 916