Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationSheath and Presheath Dynamics in Plasma Immersion Ion Implantation
Mändl, S.; Günzel, R.; Möller, W.
- Journal of Physics D: Applied Physics 31 (1998) 1109-1117
Permalink: https://www.hzdr.de/publications/Publ-940
Publ.-Id: 940