Nanotechnology

Lecturer:

Dr. Artur Erbe

Course Type:

Semester Course, 2 SWS

Start Date:

15 October 2013

Schedule:

Tuesdays, 07:30-09:00

Location:

TU Dresden, PHY (Physik, Haeckelstr. 1-5), Room C118

Summary:

The course gives an introduction into fabrication and characterization of nanoscale structures. Typical lithography methods like electron beam lithography and microscopy on the nanoscale are introduced. Applications of the nanostructures as sensors and electronic components are discussed.

Language:

English

More info:

Table of Contents

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