Contact

Dr. Shengqiang Zhou

Head Semiconductor Material­s
Head
s.zhouAthzdr.de
Phone: +49 351 260 2484

Dr. Lars Rebohle

l.rebohleAthzdr.de
Phone: +49 351 260 3368

Equipment

Deposition

Image Description
Foto: Energiespeicher FLA01 ©Copyright: Dr. Christoph Folgner

Flash lamp annealing

  • several tools for
    • 100 mm
    • 150 mm
    • 200 x 300 nm
    • 1200 x 1200 mm (at Freiberg)
  • Annealing gases: vacuum, N2, Ar, O2
  • Pulse duration: 0.5-20 ms
  • Preheating up to 1000°C
  • Energy densities up to 150 Jcm-2
  • Temperatures up to 2000°C (depending on preheating and light absorption)

Responsible: T. Schumann

Foto: Sputter-FLA ©Copyright: Dr. Lars Rebohle

Magnetron sputtering

  • Manufacturer: Rovak
  • Dust-reduced environment
  • up to 200 x 300 nm (carrier size)
  • can be combined with in-situ FLA
  • 75 mm sputter sources
    • Al, Cr, Cu, Fe, Ge, Mn, Ni, Si, Sn, Ti, TiN
    • multilayers with two sputtering sources
    • other metals on request
  • 30 mm sputter source: Au

Responsible: T. Schumann

PECVD

Plasma enhanced chemical vapour deposition (PECVD)

  • Manufacturer: Oxford Instruments
  • Dust-reduced environment
  • up to 8 inch
  • High temperature electrode up to 750°C
  • Materials:
    • SiO2
    • Si3N4, SiOxNy
    • amorphous or polycrystalline Si, Ge

Responsible: L. Rebohle

ALD Tool

with FWIO: Atomic layer deposition (ALD)

  • Manufacturer: Ultratech/CambridgeNanotechALD
  • up to 4 inch
  • Deposition temperature: 80 - 350°C
  • Materials:
    • Al2O3, HfO2, ZnO
    • mixed layers (on request)

Responsible: L. Rebohle (FWIM), T. Schönherr (FWIO)

Laserausheilung: COMPexPRO 201

Laser annealing: COMPexPRO 201

  • Manufacturer: Coherent
  • Pulsed laser (10 Hz)
  • Wavelength: 308 nm
  • Pulse duration:  30 ns
  • Max. energy: 500 mJ per pulse

Responsible: S. Zhou

Electrical characterisation

Image Description
Hall-Effekt-Messsystem

Hall effect measuring system HMS 9709A from LakeShore:

Measurement of electrical transport parameters (resistance, charge carrier density and mobility) as a function of temperature and the magnetic field.

  • Temperature range: 2.5 - 400 K
  • Maximum magnetic field: 9 T
  • Maximum sample size: 13 x 16 mm2
  • Current range: 1 pA - 100 mA
  • resistance range: 40 µΩ - 200 GΩ

Responsible: S. Zhou

Widerstandsmessung

Resistance measurement

  • 200 mm 4 Point Probe System Aitco CMT 2000
  • 400 x 300 mm Flat Panel 4 Point Probe System Aitco CMT 3000

Responsible: T. Schumann

Optical characterisation

Image Description
Optisches Labor

Optical measurement setups

  • Photoluminescence
  • Electroluminescence
  • Transmission measurement for waveguides

Responsible: S. Prucnal, L. Rebohle

Magnetic Characterisation

Image Description
SQUID-VSM

Quantum Design: SQUID-VSM

The MPMS SQUID VSM system is a highly sensitive magnetometer system that combines the sensitivity of a SQUID (Superconducting Interference Device) with the higher speed of a VSM (Vibrating Sample Magnetometer). One can measure very weak magnetic signal, both temperature and field dependence.

  • Temperature range: 1.8 - 400 K
  • Field range: from - 7 T to +7 T
  • Sensitivity: 10-7 - 10-8 emu

Verantwortlich: S. Zhou