Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Focused Ion Beam Induced Deposition (FIBID) is a nanopatterning technique that makes use of a focused beam of charged ions to decompose a gaseous precursor. So far, the flexible patterning capabilities of FIBID have been widely exploited in the fabrication of superconducting nanostructures, using the W(CO) 6 precursor mostly in combination with a focused beam of Ga+ ions. Here, the fabrication and characterization of superconducting in-plane tungsten-carbon (W-C) nanostructures by He+ FIBID of the W(CO)6 precursor is reported. A virtually unattainable for Ga+ FIBID patterning resolution of 10 nm has been achieved. When the nanowires are patterned with widths of 20 nm and above, the deposited material is superconducting below 3.5 – 4 K. In addition, 60 and 90 nm-wide nanostructures have been found to sustain long-range controlled non-local superconducting vortex transfer along 3 μm. Overall, these findings strengthen the capabilities of He+ FIBID of W-C in the growth and patterning of in-plane superconducting nanodevices.