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1 PublicationThermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties
Elsherif, A. G. A.; Koehler, N.; Liedke, M. O.; Butterling, M.; Hirschmann, E.; Ecke, R.; Schulz, S. E.; Wagner, A.
Data to ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy
Keywords: PALS; FTIR; ULK; Curing
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Thermal kinetics of free volume in porous spin-on dielectrics: exploring the …
ROBIS: 31402 has used this (Id 31002) publication of HZDR-primary research data
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Reseach data in the HZDR data repository RODARE
Publication date: 2020-05-11 Open access
DOI: 10.14278/rodare.321
Versions: 10.14278/rodare.322
License: CC-BY-4.0
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Permalink: https://www.hzdr.de/publications/Publ-31002
Publ.-Id: 31002