Focussed ion beams for nanostructures
Focused ion meams (FIB) are applied to nanostructures in the following ways:
- Focused ion beam synthesis of nanostructures(1)
- Defect formation and dynamic annealing at FIB implantation(2)
- Ga+ FIB implantation and selective wet etching for 3D nanostructures(3)
- Nanoscale surface ripple and dot patterning under FIB irradiation(4)
- Micro- und nanostructures by local FIB ion milling(5)
- LMAIS development and testing(6)
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