Compositional Changes of PMMA Layers during 15N Bombardment


Compositional Changes of PMMA Layers during 15N Bombardment

Rudolph, W.; Grambole, D.; Heiser, C.; Herrmann, F.; Neelmeijer, C.

The behaviour is investigated of thin PMMA films during 15N2+ ion bombardment at EN = = 6.50 MeV. Using the 1H(15N, alpha gamma)12C and 12C, 16O(d, p) reactions the hydrogen, carbon, and oxygen contents of the layers are measured in dependence on the 15N2+ ion fluence. Strong losses of all three elements are observed and a dependence of the film composition on the nitrogen ion fluence.

  • Physica Status Solidi (A) 112(1989), 765-768

Permalink: https://www.hzdr.de/publications/Publ-11114
Publ.-Id: 11114