Ion Bombardment of Solids - unified simulation of damage formation and thermally activated relaxation

Till now, damage formation and thermally activated relaxation are calculated by different atomistic methods like Binary Collision Approximation (BCA, TRIM code) and kinetic Monte Carlo (kMC), respectively. However, frequently damage formation and relaxation happens simultaneously. Molecular Dynamics (MD), which treats both processes, can not describe them on experimental spatiotemporal scales due to insufficient computer power. Here, an unified TRIM-kMC simulation method will be presented and applied to ion-induced nanopatterning of surfaces as well as mixing and phase separation of intermetallic compounds.