An Investigation of Target Poisoning during Reactive Magnetron Sputtering
An Investigation of Target Poisoning during Reactive Magnetron Sputtering
Güttler, D.
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Wissenschaftlich-Technische Berichte / Helmholtz-Zentrum Dresden-Rossendorf; FZD-515 2009
ISSN: 1437-322X
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Permalink: https://www.hzdr.de/publications/Publ-12633