Ultrasonic Surface Waves for Studying the Properties of Thin Films
Ultrasonic Surface Waves for Studying the Properties of Thin Films
Küchler, R.; Richter, E.
The change of the spreading velocity of ultrasonic surface waves by thin film deposition is descibed by an approximation of the nonlinear equations of motion. The effect of residual stress in deposited films on the spreading velocity is considered. As an example for practical applications, the velocity change of surface waves after TiN-film desposition on steel bars in investigated.
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Thin Solid Films 315 (1998) 29-34
DOI: 10.1016/S0040-6090(97)00457-4
Cited 11 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-1272
Publ.-Id: 1272