Ultrasonic Surface Waves for Studying the Properties of Thin Films


Ultrasonic Surface Waves for Studying the Properties of Thin Films

Küchler, R.; Richter, E.

The change of the spreading velocity of ultrasonic surface waves by thin film deposition is descibed by an approximation of the nonlinear equations of motion. The effect of residual stress in deposited films on the spreading velocity is considered. As an example for practical applications, the velocity change of surface waves after TiN-film desposition on steel bars in investigated.

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Publ.-Id: 1272