Ion Beam Assisted Deposition of AlN Monolithic Films and Al/AlN Multilayers: a Comparative Study
Ion Beam Assisted Deposition of AlN Monolithic Films and Al/AlN Multilayers: a Comparative Study
Wang, X.; Kolitsch, A.; Prokert, F.; Möller, W.
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Surface and Coatings Technology 103-104 (1998) 334-339
DOI: 10.1016/S0257-8972(98)00410-1
Cited 28 times in Scopus -
Lecture (Conference)
SMMIB 97, Gatlinburg, TE, USA, Sept. 1997
Permalink: https://www.hzdr.de/publications/Publ-1354
Publ.-Id: 1354