Prediction of surface pattern formation by surface defect generation and diffusion


Prediction of surface pattern formation by surface defect generation and diffusion

Numazawa, S.; Heinig, K.-H.

The Bradley-Harper model assumes that under ion irradiation surface pattern develop by a competition between surface curvature dependent ion erosion and surface curvature driven diffusion. By our contribution it will be shown that the curvature dependence in Sigmund’s sputter theory is not the only possible origin for surface pattern formation. For instance, very low energy ion irradiation does not create collision cascades which justifies the Bradley-Harper model, but produces rather some defects at the surface.
Therefore, simple surface defect (adatoms, vacancies) production procedures are applied in combination with kinetic 3D Monte Carlo simulations of defect recombination and diffusion. Depending on the model parameters (ion incidence angle, temperature, defect creation,…) ripples perpendicular or parallel to the ion beam or even dots have been found.

Keywords: Kinetic Monte-Carlo simulation; ion erosion; surface pattern

  • Lecture (Conference)
    Symp. "Nanoscale Pattern Formation", MRS2009Fall Meeting, 30.11.-04.12.2009, Boston, USA

Permalink: https://www.hzdr.de/publications/Publ-13673
Publ.-Id: 13673