Ion Beam Analysis at FZD: Achievements and Perspectives


Ion Beam Analysis at FZD: Achievements and Perspectives

Munnik, F.; Heller, R.

There are many applications for which it is important to know the composition of surface layers and even to know the composition as a function of depth. Such information is needed for (ultra) shallow implantation profiles and the damage caused by implantation, diffusion barriers for IC technology, interface mixing in IBAD processing, multilayers for X-ray mirrors, magnetic multilayer structures, etc.
Ion Beam Analysis (IBA) can provide answers through a variety of methods for the compositional analysis of surface layers. In this presentation, the principles of (IBA) are presented with the emphasis on those methods useful for materials science like Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA). The possibilities of analysis with our equipment is shown by means of examples of applications.

  • Lecture (others)
    Materials Science Seminar, 19.01.2010, Dresden, Germany

Permalink: https://www.hzdr.de/publications/Publ-13799
Publ.-Id: 13799