Mechanism of metal nanostructure self-ordering during oblique deposition on pre-patterned surfaces


Mechanism of metal nanostructure self-ordering during oblique deposition on pre-patterned surfaces

Numazawa, S.; Heinig, K.-H.; Ranjan, M.; Facsko, S.

By utilizing electron-beam evaporation, metal nanoclusters have been produced on pre-patterned oxidized Si surfaces. During the oblique deposition perpendicular to ripples the metal nanoclusters are grown on the slopes which point towards the evaporation source.The self-ordering of metal nanoclusters has not been observed for normal deposition and for low-angle deposition parallel to the ripple direction. This indicates that the features of the metal nanostructure depend strongly on the local deposition angle. Here, by means of 3D lattice kinetic Monte Carlo simulations, we studied the process of silver deposition on pre-patterned surfaces. The experimentally observed Ag nanostructures could be reproduced by using the many-body potential to estimate the atomistic migration barriers. It was shown that the extremely low sticking probability of deposited Ag together with a slope-dependent local deposition rate leads to a strongly localized Ag nanocluster nucleation distribution on the surface because the nucleation rate depends approximately on the dimer adatom concentration.

Keywords: Kinetic Monte-Carlo; nanopatterninig

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    DPG Frühjahrstagung der Sektion Kondensierte Materie (SKM) 2010, 21.-26.03.2010, Regensburg, Germany

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