Applications of ion beams in Nanotechnology

Ion beam are used largely in industry for surface treatment and deposition. In the last years low energy ion beam irradiation have shown potential for surface nanostructuring, either by direct writing with a focused ion beam, or by self-organized pattern formation during broad beam irradiations. I will present current activities of the HZDR of surface nanostructuring with oin beams and the application of such patterns in magnetism and plasmonics.