Nanopattering on crystal Ge surfaces
Nanopattering on crystal Ge surfaces
Ou, X.; Grenzer, J.; Facsko, S.
In contrast to the nanopattering on amorphous semiconductor surfaces by ion irradiation, nanostructures on crystal Ge surfaces are created by irradiation under the temperatures above the recrystallization temperature. The temperature, fluence and orientation dependence on the nanopattens formation are demonstrated in this talk.
Keywords: irradiation; nanopattern; crystal Ge surface
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Lecture (others)
Forschergruppe 845 project workshop, 07.-08.11.2012, Dresden, Germany
Permalink: https://www.hzdr.de/publications/Publ-18273
Publ.-Id: 18273