More Moore or More-than-Moore or Nothing more? A nanoView on silicon & germanium...


More Moore or More-than-Moore or Nothing more? A nanoView on silicon & germanium...

Skorupa, W.

It is obvious that we approach the limits of Moore’s law and have to think about moving on, or, move different route, or, may be, move not anymore? Having spent more than 35 years with microelectronics and chip technology the answer to this question is not simple for me… In this talk I will try to discuss some aspects of that kind of “cultural doubting”, but will not miss to present also a review of our recent results regarding advanced processing for silicon and germanium nanostructures based on ion beam processing and/or short time annealing in the millisecond range: a) III-V nanocrystals heteroepitaxially arranged on silicon nanowires (S. Prucnal et al., NanoLett. 11, 2814 (2011)) b) Superconductivity from Ga-rich nanoscale layers at Si/Ge-SiO2 interfaces (J. Fiedler et al., Phys.Rev. B 85, 134530 (2012)) c) Horizontal silicon nanowires on insulator by ion beam erosion (X. Ou et al., AIP Advances 1, 042174 (2011))

Keywords: short time annealing; Moore’s law; ion beam processing

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