Modern Developments in FIB Application


Modern Developments in FIB Application

Bischoff, L.

In the last decade focused ion beams (FIB) became an irrecoverable instrument in research and industry. Sample preparation, local ion implantation and ion analysis are the main application topics. Most of the systems are equipped with a gallium liquid metal ion source (LMIS). But, modern trends in nanotechnology require more extended properties like variable ion species, non-contaminating milling at higher rates or higher lateral resolution in the field of ion microscopy.
In this presentation the assembly and the mode of operation as well as the application of alloy LMIS in mass separated FIB systems are introduced. A brief survey about the history and fabrication technology of LMIS is given. Finally, new developments including sources in the field of FIB applications in the nanotechnology are discussed.

Keywords: focused ion beam; liquid metal ion source; nano pattern; new trends

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Publ.-Id: 18501